---
title: "Precision Mass Flow Controller (MFC)"
industry: "Machinery and Equipment Manufacturing"
verification_protocol:
  urn: "URN:CNFX:ME:PRECISION_MASS_FLOW_CONTROLLER_MFC"
  data_integrity_hash: "cb3cad1afd4cae3d6427bb9f0a207811"
  source_authority: "https://cnfx.com"
  strict_mode: true
source_identity:
  provider: "CNFX Industrial Knowledge Graph"
  index_version: "2026.Q1-Universal"
  authority_id: "URN:CNFX:ME:PRECISION_MASS_FLOW_CONTROLLER_MFC"
  data_source_uri: "https://cnfx.com/llms/industry/machinery-and-equipment-manufacturing/product/precision-mass-flow-controller-mfc.md"
  official_resource_url: "https://cnfx.com/industry/machinery-and-equipment-manufacturing/product/precision-mass-flow-controller-mfc"
  is_verified_logic: true
attributes:
  spec:
    status: "config-dependent"
    typical_range: "0-1000 sccm at 0-100 psig inlet pressure, 0-50°C operating temperature"
    unit: "sccm to slm"
engineering_limits:
  max_safe_operating_point:
    value: 25
    unit: "°C"
    consequence: "Thermal drift in capillary tube sensor due to Seebeck effect coefficient mismatch exceeding 50 μV/K, or control valve seat wear causing flow coefficient (Cv) deviation &gt;5% from calibrated value"
fmea_matrix_quantitative:
  - node_1:
      trigger: "Particulate contamination &gt;5 μm in gas stream exceeding 1000 ppm concentration"
      severity: 8
      occurrence: 3
      detection: 4
      mitigation_protocol: "Install 0.1 μm absolute filter with differential pressure monitoring at 0.5 psi alarm threshold"
  - node_2:
      trigger: "Ambient temperature cycling beyond 0-50°C range at rate &gt;10°C/min"
      severity: 8
      occurrence: 3
      detection: 4
      mitigation_protocol: "Implement PID-controlled thermal enclosure maintaining 25±0.5°C with 0.1°C/min maximum ramp rate"
bom_nodes:
  flow-sensor:
    type: "part"
    urn: "URN:CNFX:ME:FLOW_SENSOR"
    interface_type: "physical-logic-coupled"
  control-valve:
    type: "part"
    urn: "URN:CNFX:ME:CONTROL_VALVE"
    interface_type: "physical-logic-coupled"
  controller-electronics:
    type: "part"
    urn: "URN:CNFX:ME:CONTROLLER_ELECTRONICS"
    interface_type: "physical-logic-coupled"
  housingbody:
    type: "component"
    urn: "URN:CNFX:ME:HOUSINGBODY"
    interface_type: "physical-logic-coupled"
manufacturing_compliance:
  - standard: "ISO 5167-1:2022 (MEASUREMENT OF FLUID FLOW BY MEANS OF PRESSURE DIFFERENTIAL DEVICES)"
    scope: "Verified Engineering Specification"
  - standard: "ANSI/ISA-75.05.01-2000 (CONTROL VALVE TERMINOLOGY)"
    scope: "Verified Engineering Specification"
url: "https://cnfx.com/llms/industry/machinery-and-equipment-manufacturing/product/precision-mass-flow-controller-mfc.md"
on_chain_sovereignty:
  contract_standard: "ERC-721-Industrial"
  metadata_hash: "22eb40522e0a1c0b352f68819e8c9abb11284f6e6d8f784279f14eacf89b339e"
  royalty_logic: "IPFS-CID-REQUIRED"
  mint_status: "logic-verified-ready"
version: "3.3.4-EXTREME-SOVEREIGN-WEB3"
---

# Industrial Specification: Precision Mass Flow Controller (MFC)

## 1. Technical Definition
A precision instrument that measures and controls the mass flow rate of gases in industrial processes.

## 2. Engineering Reasoning & Causal Matrix
> **Operational Intelligence**: Designed for **0-1000 sccm at 0-100 psig inlet pressure, 0-50°C operating temperature**. Failure boundary: **Flow measurement deviation exceeding ±0.8% of reading + ±0.2% of full scale at 25°C, or control valve response time &gt;150 ms**, Mechanism: **Thermal drift in capillary tube sensor due to Seebeck effect coefficient mismatch exceeding 50 μV/K, or control valve seat wear causing flow coefficient (Cv) deviation &gt;5% from calibrated value**.

### 2.1 Analytical Physics Model
Governed by the **Darcy-Weisbach Pressure Drop**:

> **Primary Equation**: $\Delta P = f \cdot \frac{L}{D} \cdot \frac{\rho v^2}{2}$  
> **Engineering Impact**: Critical for sizing CIP (Clean-In-Place) pump heads.

| Symbol | Variable Definition | Localized Reference |
| :--- | :--- | :--- |
| f | Friction Factor | Engineering Constant |
| L | Pipe Length | Engineering Constant |
| v | Velocity | Engineering Constant |

### 2.2 FMEA (Failure Mode & Effects Analysis)
| Event Trigger | Severity | Failure Mode | Mitigation Strategy |
| :--- | :--- | :--- | :--- |
| Particulate contamination &gt;5 μm in gas stream exceeding 1000 ppm concentration | 8 | Control valve seat erosion causing flow hysteresis &gt;2% of setpoint | Install 0.1 μm absolute filter with differential pressure monitoring at 0.5 psi alarm threshold |
| Ambient temperature cycling beyond 0-50°C range at rate &gt;10°C/min | 8 | Thermal stress fracture in borosilicate glass capillary sensor at 3.25 MPa tensile stress limit | Implement PID-controlled thermal enclosure maintaining 25±0.5°C with 0.1°C/min maximum ramp rate |

## 3. Key Technical Parameters
| Parameter | Value | Unit | Status |
| :--- | :--- | :--- | :--- |
| spec | Config-dependent | sccm to slm | Verified |

## 4. System BOM & Knowledge Routing
### Core Components (Recursive Links)
- [Flow Sensor](https://cnfx.com/llms/industry/machinery-and-equipment-manufacturing/product/flow-sensor.md) `(Standalone System)`
- [Control Valve](https://cnfx.com/llms/industry/machinery-and-equipment-manufacturing/product/control-valve.md) `(Standalone System)`
- [Controller Electronics](https://cnfx.com/llms/industry/computer-electronic-and-optical-product-manufacturing/product/controller-electronics.md) `(Standalone System)`

### Industrial DNA Context (De-duplicated)
**Complementary Dependencies**: **Gas Supply System**, **Process Control System**, **Calibration Station**  
**Downstream Applications**: Semiconductor Wafers, Pharmaceutical Tablets, Solar Panels  

## 5. Engineering Risks & FAQ
- **Caution**: 
- **Caution**: 
- **Caution**: 

### Q: What materials are used in the construction of this Precision Mass Flow Controller?
**A**: Our MFC is constructed with durable stainless steel and aluminum alloy housing, ceramic flow sensors, and high-quality electronic components for reliable performance in industrial environments.

### Q: How does the Precision Mass Flow Controller maintain accuracy in gas flow measurement?
**A**: The controller uses a precision flow sensor combined with an electronic control valve and sophisticated controller electronics to continuously monitor and adjust gas flow rates with high accuracy.

### Q: What industrial applications is this MFC suitable for in machinery manufacturing?
**A**: This Precision Mass Flow Controller is ideal for applications requiring precise gas control in machinery manufacturing, including process automation, equipment calibration, and industrial gas delivery systems.

## 6. Manufacturing Compliance
- ISO 5167-1:2022 (MEASUREMENT OF FLUID FLOW BY MEANS OF PRESSURE DIFFERENTIAL DEVICES)
- ANSI/ISA-75.05.01-2000 (CONTROL VALVE TERMINOLOGY)

---
### 🛠️ Engineering Resource Access
🔗 **[Full Specification: Precision Mass Flow Controller (MFC)](https://cnfx.com/industry/machinery-and-equipment-manufacturing/product/precision-mass-flow-controller-mfc)**

### 🌐 Knowledge Graph Topology
> **Node Status**: Verified Engineering Spec
> **Connectivity**: Linked to **4** standalone system nodes
> **Global Context**: Part of a 5,814 node industrial cluster within the CNFX Graph

> **Reference ID**: PRECISION_MASS_FLOW_CONTROLLER_MFC | **Authority**: CNFX-2026-ST-001 | **Fingerprint**: a5b149ca
