---
title: "Vacuum Gauges"
industry: "Machinery and Equipment Manufacturing"
verification_protocol:
  urn: "URN:CNFX:ME:VACUUM_GAUGES"
  data_integrity_hash: "cc334b2b3d8a819c118b01975c91aebb"
  source_authority: "https://cnfx.com"
  strict_mode: true
source_identity:
  provider: "CNFX Industrial Knowledge Graph"
  index_version: "2026.Q1-Universal"
  authority_id: "URN:CNFX:ME:VACUUM_GAUGES"
  data_source_uri: "https://cnfx.com/llms/industry/machinery-and-equipment-manufacturing/product/vacuum-gauges.md"
  official_resource_url: "https://cnfx.com/industry/machinery-and-equipment-manufacturing/product/vacuum-gauges"
  is_verified_logic: true
attributes:
  spec:
    status: "config-dependent"
    typical_range: "1e-9 to 1000 Torr (1.33e-7 to 133.3 kPa)"
    unit: "mbar, Torr, Pa"
engineering_limits:
  max_safe_operating_point:
    value: 1
    unit: "e"
    consequence: "Ionization gauge filament burnout at pressures &gt;1e-3 Torr due to excessive electron current, Pirani gauge thermal runaway at pressures &lt;1e-4 Torr due to insufficient gas conduction"
fmea_matrix_quantitative:
  - node_1:
      trigger: "Thermal stress from rapid pressure cycling between 1e-6 and 1 Torr"
      severity: 8
      occurrence: 3
      detection: 4
      mitigation_protocol: "Dual-filament design with temperature-compensated Wheatstone bridge circuit"
  - node_2:
      trigger: "Electron bombardment at 150 eV with current density &gt;10 mA/cm²"
      severity: 8
      occurrence: 3
      detection: 4
      mitigation_protocol: "Periodic electron bombardment cleaning at 500 eV for 30 minutes"
bom_nodes:
  sensor-head-tube:
    type: "part"
    urn: "URN:CNFX:ME:SENSOR_HEAD_TUBE"
    interface_type: "physical-logic-coupled"
  electronics-controller:
    type: "part"
    urn: "URN:CNFX:ME:ELECTRONICS_CONTROLLER"
    interface_type: "physical-logic-coupled"
  display:
    type: "part"
    urn: "URN:CNFX:ME:DISPLAY"
    interface_type: "physical-logic-coupled"
  connection-port-flange:
    type: "component"
    urn: "URN:CNFX:ME:CONNECTION_PORT_FLANGE"
    interface_type: "physical-logic-coupled"
manufacturing_compliance:
  - standard: "ISO 3567:2011 - VACUUM GAUGES - CALIBRATION BY DIRECT COMPARISON WITH A REFERENCE GAUGE"
    scope: "Verified Engineering Specification"
  - standard: "ANSI/ASME B40.100-2013 - PRESSURE GAUGES AND GAUGE ATTACHMENTS"
    scope: "Verified Engineering Specification"
  - standard: "DIN 28400-1:2012 - VACUUM TECHNOLOGY - ACCEPTANCE SPECIFICATIONS - PART 1: MEASUREMENT OF ULTIMATE PRESSURE"
    scope: "Verified Engineering Specification"
url: "https://cnfx.com/llms/industry/machinery-and-equipment-manufacturing/product/vacuum-gauges.md"
on_chain_sovereignty:
  contract_standard: "ERC-721-Industrial"
  metadata_hash: "44c456f8bfd2629b083065c5c83f21f390f465457f92291fb7cd0f5ec066f114"
  royalty_logic: "IPFS-CID-REQUIRED"
  mint_status: "logic-verified-ready"
version: "3.3.4-EXTREME-SOVEREIGN-WEB3"
---

# Industrial Specification: Vacuum Gauges

## 1. Technical Definition
Instruments that measure and display the pressure level within a vacuum system.

## 2. Engineering Reasoning & Causal Matrix
> **Operational Intelligence**: Designed for **1e-9 to 1000 Torr (1.33e-7 to 133.3 kPa)**. Failure boundary: **1e-12 Torr (1.33e-10 kPa) for ultra-high vacuum gauges, 1500 Torr (200 kPa) for high-pressure gauges**, Mechanism: **Ionization gauge filament burnout at pressures &gt;1e-3 Torr due to excessive electron current, Pirani gauge thermal runaway at pressures &lt;1e-4 Torr due to insufficient gas conduction**.

### 2.1 Analytical Physics Model
Governed by the **Thin-Wall Pressure Vessel Stress Analysis**:

> **Primary Equation**: $\sigma_h = \frac{P \cdot D}{2t}$  
> **Engineering Impact**: Determines the hoop stress boundary to prevent rupture.

| Symbol | Variable Definition | Localized Reference |
| :--- | :--- | :--- |
| P | Internal Pressure | Engineering Constant |
| D | Diameter | Engineering Constant |
| t | Wall Thickness | Engineering Constant |

### 2.2 FMEA (Failure Mode & Effects Analysis)
| Event Trigger | Severity | Failure Mode | Mitigation Strategy |
| :--- | :--- | :--- | :--- |
| Thermal stress from rapid pressure cycling between 1e-6 and 1 Torr | 8 | Pirani gauge filament fracture due to cyclic thermal expansion mismatch | Dual-filament design with temperature-compensated Wheatstone bridge circuit |
| Electron bombardment at 150 eV with current density &gt;10 mA/cm² | 8 | Bayard-Alpert gauge collector contamination causing measurement drift &gt;5% | Periodic electron bombardment cleaning at 500 eV for 30 minutes |

## 3. Key Technical Parameters
| Parameter | Value | Unit | Status |
| :--- | :--- | :--- | :--- |
| spec | Config-dependent | mbar, Torr, Pa | Verified |

## 4. System BOM & Knowledge Routing
### Core Components (Recursive Links)
- [Sensor Head / Tube](https://cnfx.com/llms/industry/machinery-and-equipment-manufacturing/product/sensor-head-tube.md) `(Standalone System)`
- [Electronics / Controller](https://cnfx.com/llms/industry/computer-electronic-and-optical-product-manufacturing/product/electronics-controller.md) `(Standalone System)`
- [Display](https://cnfx.com/llms/industry/computer-electronic-and-optical-product-manufacturing/product/display.md) `(Standalone System)`

### Industrial DNA Context (De-duplicated)
**Complementary Dependencies**: **Vacuum Pump**, **Vacuum Chamber**, **Pressure Controller**  
**Downstream Applications**: Semiconductor Wafers, Thin-Film Coatings, Medical Sterilization Equipment  

## 5. Engineering Risks & FAQ
- **Caution**: 
- **Caution**: 
- **Caution**: 

### Q: What materials are vacuum gauges typically made from for industrial applications?
**A**: Industrial vacuum gauges are commonly constructed from stainless steel for durability, glass for visibility in certain designs, and ceramic for high-temperature or corrosive environments, ensuring reliable performance in machinery manufacturing settings.

### Q: How do vacuum gauges measure pressure in vacuum systems?
**A**: Vacuum gauges use a sensor head or tube to detect pressure levels within the vacuum system, with electronics/controllers processing the data and displaying the results on a readout, typically connected via flanged ports for secure integration.

### Q: What are the key components in a vacuum gauge's bill of materials (BOM)?
**A**: A standard vacuum gauge BOM includes the sensor head/tube for pressure detection, electronics/controller for signal processing, a display unit for readouts, and connection ports (often flanges) for system integration, ensuring accurate vacuum pressure monitoring.

## 6. Manufacturing Compliance
- ISO 3567:2011 - VACUUM GAUGES - CALIBRATION BY DIRECT COMPARISON WITH A REFERENCE GAUGE
- ANSI/ASME B40.100-2013 - PRESSURE GAUGES AND GAUGE ATTACHMENTS
- DIN 28400-1:2012 - VACUUM TECHNOLOGY - ACCEPTANCE SPECIFICATIONS - PART 1: MEASUREMENT OF ULTIMATE PRESSURE

---
### 🛠️ Engineering Resource Access
🔗 **[Full Specification: Vacuum Gauges](https://cnfx.com/industry/machinery-and-equipment-manufacturing/product/vacuum-gauges)**

### 🌐 Knowledge Graph Topology
> **Node Status**: Verified Engineering Spec
> **Connectivity**: Linked to **4** standalone system nodes
> **Global Context**: Part of a 5,814 node industrial cluster within the CNFX Graph

> **Reference ID**: VACUUM_GAUGES | **Authority**: CNFX-2026-ST-001 | **Fingerprint**: a5846109
