---
title: "Vacuum Valve"
industry: "Machinery and Equipment Manufacturing"
verification_protocol:
  urn: "URN:CNFX:ME:VACUUM_VALVE"
  data_integrity_hash: "e9eaf4b6f57b17039fb714194ddd6dd2"
  source_authority: "https://cnfx.com"
  strict_mode: true
source_identity:
  provider: "CNFX Industrial Knowledge Graph"
  index_version: "2026.Q1-Universal"
  authority_id: "URN:CNFX:ME:VACUUM_VALVE"
  data_source_uri: "https://cnfx.com/llms/industry/machinery-and-equipment-manufacturing/product/vacuum-valve.md"
  official_resource_url: "https://cnfx.com/industry/machinery-and-equipment-manufacturing/product/vacuum-valve"
  is_verified_logic: true
attributes:
  spec:
    status: "config-dependent"
    typical_range: "1e-6 to 1013 mbar (10^-6 to 1013 hPa)"
    unit: "mm"
engineering_limits:
  max_safe_operating_point:
    value: 1
    unit: "e"
    consequence: "Seal material creep deformation exceeding 0.1 mm at 150°C, causing molecular flow leakage through elastomer compression set"
fmea_matrix_quantitative:
  - node_1:
      trigger: "Particulate contamination exceeding 5 μm diameter on sealing surface"
      severity: 8
      occurrence: 3
      detection: 4
      mitigation_protocol: "Install 0.1 μm absolute filter upstream with differential pressure monitoring at 50 mbar threshold"
  - node_2:
      trigger: "Thermal cycling between -40°C and 200°C at 10 cycles/hour"
      severity: 8
      occurrence: 3
      detection: 4
      mitigation_protocol: "Replace metallic bellows with welded diaphragm design rated for 10^7 cycles at ΔT=240°C"
bom_nodes:
  valve-body:
    type: "part"
    urn: "URN:CNFX:ME:VALVE_BODY"
    interface_type: "physical-logic-coupled"
  seal:
    type: "component"
    urn: "URN:CNFX:ME:SEAL"
    interface_type: "physical-logic-coupled"
  actuator:
    type: "part"
    urn: "URN:CNFX:ME:ACTUATOR"
    interface_type: "physical-logic-coupled"
manufacturing_compliance:
  - standard: "ISO 21358:2020 VACUUM TECHNOLOGY - VACUUM VALVES - SPECIFICATIONS AND TESTING"
    scope: "Verified Engineering Specification"
url: "https://cnfx.com/llms/industry/machinery-and-equipment-manufacturing/product/vacuum-valve.md"
on_chain_sovereignty:
  contract_standard: "ERC-721-Industrial"
  metadata_hash: "07cc1c2c8b6b06a5e2ca0dab742a4e25fc023e393103675df057ee59af9d0227"
  royalty_logic: "IPFS-CID-REQUIRED"
  mint_status: "logic-verified-ready"
version: "3.3.4-EXTREME-SOVEREIGN-WEB3"
---

# Industrial Specification: Vacuum Valve

## 1. Technical Definition
A valve designed to control the flow of gases or fluids within a vacuum system, maintaining pressure isolation between different sections.

## 2. Engineering Reasoning & Causal Matrix
> **Operational Intelligence**: Designed for **1e-6 to 1013 mbar (10^-6 to 1013 hPa)**. Failure boundary: **Leak rate exceeding 1e-9 mbar·L/s (helium) at 1 mbar differential pressure**, Mechanism: **Seal material creep deformation exceeding 0.1 mm at 150°C, causing molecular flow leakage through elastomer compression set**.

### 2.1 Analytical Physics Model
Governed by the **Thin-Wall Pressure Vessel Stress Analysis**:

> **Primary Equation**: $\sigma_h = \frac{P \cdot D}{2t}$  
> **Engineering Impact**: Determines the hoop stress boundary to prevent rupture.

| Symbol | Variable Definition | Localized Reference |
| :--- | :--- | :--- |
| P | Internal Pressure | Engineering Constant |
| D | Diameter | Engineering Constant |
| t | Wall Thickness | Engineering Constant |

### 2.2 FMEA (Failure Mode & Effects Analysis)
| Event Trigger | Severity | Failure Mode | Mitigation Strategy |
| :--- | :--- | :--- | :--- |
| Particulate contamination exceeding 5 μm diameter on sealing surface | 8 | Vacuum leak rate increase to 1e-5 mbar·L/s | Install 0.1 μm absolute filter upstream with differential pressure monitoring at 50 mbar threshold |
| Thermal cycling between -40°C and 200°C at 10 cycles/hour | 8 | Bellows fatigue fracture at 10^5 cycles (Miner's rule cumulative damage D=1.0) | Replace metallic bellows with welded diaphragm design rated for 10^7 cycles at ΔT=240°C |

## 3. Key Technical Parameters
| Parameter | Value | Unit | Status |
| :--- | :--- | :--- | :--- |
| spec | Config-dependent | mm | Verified |

## 4. System BOM & Knowledge Routing
### Core Components (Recursive Links)
- [Valve Body](https://cnfx.com/llms/industry/machinery-and-equipment-manufacturing/product/valve-body.md) `(Standalone System)`
- [Actuator](https://cnfx.com/llms/industry/machinery-and-equipment-manufacturing/product/actuator.md) `(Standalone System)`

### Industrial DNA Context (De-duplicated)
**Complementary Dependencies**: **Vacuum Pump**, **Pressure Gauge**, **Leak Detector**  
**Downstream Applications**: Semiconductor Wafers, Thin Film Coatings, Analytical Instruments  

## 5. Engineering Risks & FAQ
- **Caution**: 
- **Caution**: 
- **Caution**: 

### Q: What materials are used in this vacuum valve?
**A**: This vacuum valve is constructed from high-grade stainless steel, ensuring durability, corrosion resistance, and reliability in demanding machinery and equipment manufacturing environments.

### Q: How does this valve maintain pressure isolation in vacuum systems?
**A**: The valve features precision-engineered seals and a robust valve body design that effectively controls gas or fluid flow, creating reliable pressure barriers between different sections of vacuum systems.

### Q: What components are included in the vacuum valve BOM?
**A**: The bill of materials includes three key components: an actuator for valve operation, specialized seals for pressure isolation, and a stainless steel valve body that houses the internal mechanisms.

## 6. Manufacturing Compliance
- ISO 21358:2020 VACUUM TECHNOLOGY - VACUUM VALVES - SPECIFICATIONS AND TESTING

---
### 🛠️ Engineering Resource Access
🔗 **[Full Specification: Vacuum Valve](https://cnfx.com/industry/machinery-and-equipment-manufacturing/product/vacuum-valve)**

### 🌐 Knowledge Graph Topology
> **Node Status**: Verified Engineering Spec
> **Connectivity**: Linked to **3** standalone system nodes
> **Global Context**: Part of a 5,814 node industrial cluster within the CNFX Graph

> **Reference ID**: VACUUM_VALVE | **Authority**: CNFX-2026-ST-001 | **Fingerprint**: a5a7e478
