Galvanometer scanner motors · moving-magnet design, mirror aperture and rotor inertia, torque constant, small-step response, repeatability in µrad, offset and gain drift with temperature, position sensor resolution and scan angle
A galvanometer motor is a limited-rotation motor that turns a mirror on its shaft to steer a laser beam, with a position sensor that feeds the mirror angle back to a servo driver; two of them, at right angles, form the X–Y scanner in laser marking, welding, cutting and imaging heads. Ask three things first: what mirror aperture and scan angle the beam needs, how fast the mirror must step and settle, and how repeatable and stable the angle must be over temperature.
Single-axis galvanometer motors and galvo scanners (motor, mirror mount and position sensor) for laser processing, imaging and medical scanning, with analog or digital drivers. Complete 2D/3D scan heads, f-theta lenses, polygon scanners and MEMS mirrors are outside this page except where compared.
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01
Thorlabs describes a galvo as a galvanometer-based scanning motor with an optical mirror on the shaft and a detector that feeds position back to the control board; it chose a moving-magnet design over a stationary magnet and rotating coil to give the fastest response and highest system resonant frequency. Its GVS series lists a maximum mechanical scan angle of ±12.5° (reduced for larger beams), full-scale bandwidth of DC to 100 Hz for a square wave and 250 Hz for a sine wave, small-angle (±0.2°) bandwidth to 1 kHz and a small-angle step response of 300 µs. [1]
Scanner Optics, a galvo maker linked to this page, lists its ST-galvo series from ≤7 mm to 50–120 mm input beam aperture; across the range, moment of inertia rises from 0.01 to 40.47 g·cm², torque constant from 0.9 to 86 N·mm/A, 1% angle response time from 0.1–0.2 ms to 1.0 ms and weight from 12 g to 1,040 g, with a maximum mechanical scan angle of ±20°. [2]
Editorial note: the larger the aperture, the larger and heavier the mirror and rotor and the slower the step response in these tables; choose the smallest aperture that passes your beam (with margin for the scan angle) and compare step times at the same angle and settling criterion.
Give the supplier the laser wavelength and power, beam diameter at the scanner, mirror coating and substrate, required scan angle, small-step and full-scale response times with the settling criterion, repeatability, drift limits and warm-up time, position sensor resolution, driver type (analog or digital, protocol), supply voltage, cooling, operating temperature and mounting.
02
Thorlabs lists motor and position sensor linearity of 99.9%, scale drift of 40 ppm/°C maximum, zero drift of 10 µrad/°C maximum and repeatability of 15 µrad, with mechanical resolution of 15 µrad on its linear power supply and 70 µrad on a standard switch-mode supply. [1] Scanner Optics lists nonlinearity below 0.4%, repeatability below 2 µrad, offset drift below 15 µrad/K, gain drift below 40 ppm/K and 18-bit position resolution, noting that 18 bits over 25° corresponds to 1.7 µrad and that its higher-end series offers up to 23 bits. [2]
Editorial calculation: 25° is 0.436 rad, and 0.436 / 2¹⁸ ≈ 1.66 µrad, consistent with the stated 1.7 µrad. A zero drift of 10 µrad/°C over a 10 °C warm-up adds up to 100 µrad of offset, more than six times the 15 µrad repeatability, so allow warm-up or use drift compensation where position must hold. The temperature change is an assumed example.
A third maker separates standard and low-drift motors. Novanta's data sheet for Cambridge Technology 62xxK and 83xxK moving-magnet galvanometers (2022) covers recommended apertures from 3–7 mm up to 30–100 mm, a 40° maximum scan angle, position-detector linearity of 99.9% minimum over 20° (99.5% over 40°), short-term repeatability of 8 µrad, and maximum drift of 50 ppm/°C scale and 15 µrad/°C zero for the 62xxK against 15 ppm/°C and 5 µrad/°C for the lower-drift 83xxK, with a 110 °C maximum rotor temperature. Its smallest 6200K/8300K motor lists 0.013 g·cm² rotor inertia, a torque constant of 1.20 × 10⁴ dyne·cm/A, 2.14 Ω and 52 µH coil, 2.3 A RMS and 6 A peak current, 3.8 °C/W rotor-to-case thermal resistance and 13.3 g weight. [3]
Editorial calculation: over a 10 °C warm-up a 62xxK's 15 µrad/°C zero drift can add 150 µrad, against 50 µrad for an 83xxK, while both repeat to 8 µrad; and 1.20 × 10⁴ dyne·cm/A is 1.2 N·mm/A, so the 6200K's 6 A peak gives about 7.2 N·mm of torque. Specify drift if the scanner must hold position through temperature changes. [3]
03
SCANLAB describes its dynAXIS galvanometer scanners as rotary motors "based on moving magnet technology and a high-accuracy position detector", with motors matched to the deflection mirror's inertial load. It offers them with mirrors for apertures from 6 mm to 30 mm; the dynAXIS 3 series, with an improved position detector for low drift, highest linearity and optional extended deflection angles, covers apertures from 10 mm to 30 mm; and the dynAXIS 421 covers apertures from 3 mm to 6 mm for biomedical and ophthalmic imaging, confocal microscopy and laser-assisted medical treatments. [4]
SCANLAB states that its motors are matched to the deflection mirror's inertial load [4]. Thorlabs reduces its ±12.5° scan angle for larger beams and gives a 300 µs small-angle step response for its small-beam GVS series [1], while Scanner Optics publishes inertia from 0.01 to 40.47 g·cm² across its range [2]. Fix the aperture from your beam diameter first, then compare step response, repeatability and drift only between scanners of that aperture.
Both SCANLAB and Thorlabs describe moving-magnet motors with a position detector feeding back the mirror angle [4] [1], and Novanta lists standard and low-drift versions of its scanners with different gain and offset drift [3]. SCANLAB's 3 series is its low-drift option; ask any supplier for the drift values of the exact family and aperture quoted, with the test temperature range.
Editorial calculation: SCANLAB's apertures span a factor of 10 from 3 mm to 30 mm; the dynAXIS 421 and the other dynAXIS models meet at 6 mm, and the 3 series starts at 10 mm. [4]
| Family | Apertures (as published) | Stated focus |
|---|---|---|
| SCANLAB dynAXIS | 6 mm to 30 mm | Industrial laser deflection; mirrors and servo boards matched |
| SCANLAB dynAXIS 3 series | 10 mm to 30 mm | Low drift, highest linearity, optional extended angles |
| SCANLAB dynAXIS 421 | 3 mm to 6 mm | Compact, fast; biomedical and ophthalmic imaging, confocal microscopy |
| Scanner Optics ST (already cited) | ≤7 mm to 120 mm | Range across its series |
Values are from SCANLAB's galvanometer scanners overview page; model data sheets were not reviewed.
04
Suppliers linked to this page list galvo motors or scanners; each card links to the page reviewed.
The listing reviewed covers galvo scanners in more than one series with analog and digital drivers, scan heads, dynamic focusing modules and optical encoders for galvo motors. Ask for step response with its settling criterion, drift figures and the test conditions.
05
This is a functional reference built from the sources cited; it is not one maker's specification.
| Part | Role | Fix in the order |
|---|---|---|
| Moving-magnet motor | Turns the shaft; fast response. [1] [2] | Torque constant; inertia. |
| Mirror | Steers the beam; sets aperture. [1] [2] | Size, coating, substrate. |
| Position sensor | Feeds back mirror angle. [1] [2] | Type and resolution. |
| Servo driver | Closes the position loop. [1] [2] | Analog or digital. |
| Coil | Drive current. [2] | Resistance, inductance, peak current. |
06
A galvo motor quotation needs values for your scanner. The table explains each field, gives published values where a reviewed source states them, and says what to obtain from the supplier.
| Field | What it means and published values | Ask the supplier for |
|---|---|---|
| Aperture | Examples: ≤7 mm to 120 mm [2]; 3–6 mm, 6–30 mm, 10–30 mm by family. [4] | Aperture for your beam. |
| Scan angle (mechanical) | Examples: ±12.5°; ±20°. [1] [2] | Angle at your aperture. |
| Step response | Examples: 300 µs small-angle; 0.1–1.0 ms (1%). [1] [2] | Time and criterion. |
| Repeatability | Examples: 15 µrad; < 2 µrad; 8 µrad. [1] [2] [3] | Value and test method. |
| Drift | Examples: 40 ppm/°C, 10 µrad/°C; 50 vs 15 ppm/°C and 15 vs 5 µrad/°C (standard vs low-drift). [1] [3] | Gain and offset drift. |
| Resolution | Examples: 18-bit (1.7 µrad over 25°); up to 23-bit. [2] | Sensor resolution. |
| Inertia / torque constant | Examples: 0.01–40.47 g·cm²; 0.013 g·cm², 1.2 N·mm/A (smallest motor). [2] [3] | Values for the model. |
07
Paste it into your enquiry below or into an email to a maker, then replace every bracket.
Beam: [wavelength; power; diameter] Mirror: [aperture; coating] Motion: [scan angle; step and full-scale response] Accuracy: [repeatability; drift; resolution] Driver: [analog/digital; protocol; supply] Environment: [temperature; cooling; mounting]
These companies list galvo motors or galvo scanners.
Lists galvo scanners, drivers, scan heads and optical encoders for galvo motors.
Product scope checked 2026-10-11
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Thorlabs says it chose moving-magnet over moving-coil to give the fastest response and highest resonant frequency. [1]
Examples: Thorlabs GVS 15 µrad; Scanner Optics ST series below 2 µrad with 18-bit sensing. [1] [2]
In Scanner Optics' table, larger apertures have higher rotor inertia and longer 1% response times, from 0.1 ms up to 1.0 ms. [2]
Cambridge Technology's data sheet lists 50 ppm/°C scale and 15 µrad/°C zero drift for its 62xxK motors against 15 ppm/°C and 5 µrad/°C for the 83xxK, with 8 µrad repeatability for both. [3]
SCANLAB lists its dynAXIS galvanometer scanners for apertures from 6 mm to 30 mm, the low-drift dynAXIS 3 series from 10 mm to 30 mm, and the compact dynAXIS 421 from 3 mm to 6 mm. [4]
Sources checked 2026-10-12. Thorlabs (cited from an Internet Archive copy) and Scanner Optics are makers describing their own galvo scanners; their figures are examples, not limits.
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