INDUSTRY COMPONENT

Proof Mass

Proof mass is the inertial reference element in accelerometers that converts acceleration into measurable displacement or force.

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Component Specifications

Definition
A proof mass is a precisely manufactured component within accelerometers that serves as the inertial reference point. When subjected to acceleration, the proof mass experiences inertial forces relative to the sensor frame, causing displacement or strain that is measured by transduction mechanisms (capacitive, piezoelectric, piezoresistive, or optical) to quantify acceleration magnitude and direction. Its design directly determines sensitivity, frequency response, linearity, and cross-axis rejection capabilities of the accelerometer.
Working Principle
Newton's second law of motion (F=ma) - when acceleration is applied to the accelerometer housing, the proof mass resists motion due to its inertia, creating relative displacement or force proportional to acceleration. This displacement/force is converted into electrical signals through various transduction methods.
Materials
High-density materials with stable mechanical properties: Tungsten alloys (WNiFe, WNiCu), Stainless steel (17-4PH, 316L), Silicon (for MEMS), Invar, or Platinum alloys. Material selection depends on required density, thermal stability, corrosion resistance, and manufacturing process.
Technical Parameters
  • Mass 1mg to 100g
  • Density 7.8-19.3 g/cm³
  • Symmetry >99.5%
  • Tolerance ±0.5-5μm
  • Surface Finish Ra 0.1-0.8μm
  • Resonant Frequency 500Hz-50kHz
Standards
ISO 16063-21, ISO 5348, DIN EN 60068-2-6

Industry Taxonomies & Aliases

Commonly used trade names and technical identifiers for Proof Mass.

proof mass accelerometer component inertial sensor seismic mass MEMS accelerometer vibration sensor inertial measurement Proof Mass in Computer, Electronic and Optical Product Manufacturing

Parent Products

This component is used in the following industrial products

Accelerometer

A sensor that measures proper acceleration (g-force) along one or more axes.

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Gyroscope

A device that measures or maintains orientation and angular velocity.

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3-Axis Accelerometer

A sensor that measures acceleration along three orthogonal axes (X, Y, Z).

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Engineering Analysis

Risks & Mitigation
  • Mass asymmetry causing cross-axis sensitivity
  • Material creep affecting long-term stability
  • Thermal expansion mismatches
  • Resonance at operating frequencies
  • Contamination affecting mass properties
FMEA Triads
Trigger: Asymmetric mass distribution
Failure: Cross-axis sensitivity exceeding specifications
Mitigation: Implement precision balancing during manufacturing and symmetrical design
Trigger: Material fatigue or creep
Failure: Drift in sensitivity over time
Mitigation: Use materials with high fatigue resistance and stable mechanical properties
Trigger: Thermal expansion mismatch with housing
Failure: Temperature-dependent zero offset
Mitigation: Select materials with compatible thermal expansion coefficients

Industrial Ecosystem

Compatible With

Interchangeable Parts

Compliance & Inspection

Tolerance
Geometric tolerances per ISO 1101, mass tolerance ±0.1-1% depending on application
Test Method
Coordinate measuring machines (CMM) for geometry, precision balances for mass, modal analysis for resonant frequency, thermal cycling tests

Buyer Feedback

★★★★☆ 4.9 / 5.0 (13 reviews)

"The technical documentation for this Proof Mass is very thorough, especially regarding technical reliability."

"Reliable performance in harsh Computer, Electronic and Optical Product Manufacturing environments. No issues with the Proof Mass so far."

"Testing the Proof Mass now; the technical reliability results are within 1% of the laboratory datasheet."

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Frequently Asked Questions

Why is high density important for proof mass materials?

Higher density materials provide greater inertial force for the same volume, increasing sensitivity and signal-to-noise ratio while allowing miniaturization.

How does proof mass design affect accelerometer performance?

Mass value determines sensitivity, geometry affects frequency response and cross-axis sensitivity, material properties influence thermal stability, and manufacturing precision impacts measurement accuracy.

What are common manufacturing methods for proof masses?

Machining (for macro-scale), MEMS fabrication (for micro-scale), EDM, precision grinding, and laser micromachining, depending on size, material, and tolerance requirements.

Can I contact factories directly?

Yes, each factory profile provides direct contact information.

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