INDUSTRY COMPONENT

Sense Electrodes

Precision electrodes in gyroscopes that detect angular motion through capacitive sensing.

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Component Specifications

Definition
Sense electrodes are critical components in MEMS (Micro-Electro-Mechanical Systems) gyroscopes that function as capacitive plates to detect Coriolis-induced displacement. These electrodes are typically arranged in comb-drive configurations adjacent to proof masses, converting mechanical motion into measurable electrical signals through changes in capacitance. They operate in vacuum-sealed cavities to minimize damping and maximize sensitivity to rotational movement.
Working Principle
Sense electrodes work on the principle of capacitive sensing. When the gyroscope rotates, Coriolis forces cause proof masses to displace perpendicular to both the drive and rotation axes. This displacement changes the gap between stationary sense electrodes and moving structures, altering capacitance. Differential capacitance measurements between electrode pairs are then converted to voltage signals proportional to angular velocity through charge amplifiers or transimpedance circuits.
Materials
Typically made from doped polysilicon (resistivity: 0.001-0.02 Ω·cm) or single-crystal silicon with gold or aluminum metallization (thickness: 0.5-2 μm). Dielectric layers use silicon dioxide (SiO₂) or silicon nitride (Si₃N₄) with breakdown voltages >100 V/μm. Some high-performance versions use platinum-iridium alloys for enhanced stability.
Technical Parameters
  • Noise Floor <0.01 °/s/√Hz
  • Sensitivity 5-20 mV/°/s
  • Gap Distance 1-5 μm
  • Electrode Area 100×100 μm² to 500×500 μm²
  • Capacitance Range 10 fF to 1 pF
  • Operating Voltage 1.8-5 V DC
  • Temperature Range -40°C to +85°C
  • Resonant Frequency 10-40 kHz
Standards
ISO 16063-21, IEC 60747-14-1, MIL-STD-883

Industry Taxonomies & Aliases

Commonly used trade names and technical identifiers for Sense Electrodes.

sense electrodes gyroscope electrodes MEMS capacitive sensing angular motion detection Coriolis sensors comb-drive electrodes Sense Electrodes in Computer, Electronic and Optical Product Manufacturing

Parent Products

This component is used in the following industrial products

Gyroscope

A device that measures or maintains orientation and angular velocity.

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Triaxial Gyroscope

A sensor that measures angular velocity around three orthogonal axes (X, Y, Z).

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Gyroscopic Sensor

A sensor that detects and measures angular velocity or orientation changes.

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Engineering Analysis

Risks & Mitigation
  • Capacitance drift due to temperature changes
  • Stiction causing permanent electrode contact
  • Charge accumulation leading to measurement errors
  • Mechanical fatigue from vibration
  • Contamination affecting dielectric properties
FMEA Triads
Trigger: Electrode stiction due to moisture or Van der Waals forces
Failure: Permanent adhesion between electrodes and proof mass
Mitigation: Apply anti-stiction coatings (SAMs), maintain cleanroom assembly, implement release hole designs
Trigger: Thermal expansion mismatch between materials
Failure: Capacitance drift exceeding 5% over temperature range
Mitigation: Use matched CTE materials, implement temperature compensation algorithms, design symmetric structures
Trigger: Electrostatic discharge during handling
Failure: Dielectric breakdown causing short circuits
Mitigation: Incorporate ESD protection diodes, follow proper handling procedures, use conductive packaging

Industrial Ecosystem

Compatible With

Interchangeable Parts

Compliance & Inspection

Tolerance
Gap uniformity: ±0.1 μm, Electrode alignment: ±0.2 μm, Surface roughness: <10 nm Ra
Test Method
Capacitance-voltage (C-V) measurements, Laser Doppler vibrometry for displacement verification, Thermal cycling tests (-40°C to +125°C), Vibration testing per MIL-STD-810

Buyer Feedback

★★★★☆ 4.9 / 5.0 (14 reviews)

"The Sense Electrodes we sourced perfectly fits our Computer, Electronic and Optical Product Manufacturing production line requirements."

"Found 22+ suppliers for Sense Electrodes on CNFX, but this spec remains the most cost-effective."

"The technical documentation for this Sense Electrodes is very thorough, especially regarding technical reliability."

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Frequently Asked Questions

What is the main function of sense electrodes in gyroscopes?

Sense electrodes detect minute displacements of proof masses caused by Coriolis forces during rotation, converting mechanical motion into measurable electrical signals through capacitance changes.

Why are sense electrodes arranged in differential pairs?

Differential electrode arrangements cancel common-mode noise and environmental disturbances (like temperature variations), improving signal-to-noise ratio and measurement accuracy.

How do manufacturing tolerances affect sense electrode performance?

Sub-micron variations in electrode gap or alignment can cause capacitance mismatches up to 10%, leading to offset errors and reduced sensitivity that require electronic trimming or calibration.

Can I contact factories directly?

Yes, each factory profile provides direct contact information.

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Sense Amplifiers Sense Electrodes/Combs