Sense Electrodes/Combs: Capacitance Range 10-100 fF

Component Specifications

Definition

Sense electrodes, also known as comb drives or interdigitated fingers, are microelectromechanical system (MEMS) structures in 3-axis gyroscopes. They form variable capacitors that detect Coriolis-induced motion between stationary (stator) and movable (rotor) comb fingers. As the gyroscope rotates, the Coriolis force displaces the proof mass, changing the capacitance between comb fingers, which is converted into electrical signals proportional to angular velocity.

Working Principle

Operates on capacitive sensing principle. Stationary comb fingers are fixed to the substrate, while movable fingers are attached to a proof mass suspended by springs. During rotation, Coriolis acceleration causes proof mass oscillation perpendicular to drive direction, changing overlap area or gap between comb fingers, thus modulating capacitance. This capacitance change is measured by integrated circuitry to calculate angular velocity.

Materials

Single-crystal silicon (SCS) or polysilicon with silicon dioxide insulation; gold or aluminum metallization for electrical contacts; silicon nitride for stress compensation layers.

Technical Parameters

Parameter	Typical range	Notes & selection driver
Finger Gap	1-3 μm
Sensitivity	1-10 mV/°/s
Finger Width	1-5 μm
Overlap Area	1000-5000 μm²
Finger Length	50-200 μm
Capacitance Range	10-100 fF
Quality Factor (Q)	100-1000
Resonant Frequency	10-30 kHz

Ranges are indicative industry figures for RFQ preparation, not a supplier commitment. Confirm every value and standard with the legal manufacturer before ordering.

Standards

ISO/IEC 62047, DIN EN 62047

Parent Products

This component is used in the following industrial products

3-Axis Gyroscope

The 3-Axis Gyroscope is a component used in the manufacturing of computer, electronic, and optical products.

View Product Details

Engineering Analysis

Risks & Mitigation

Stiction causing permanent adhesion
Capacitance drift due to temperature variations
Mechanical fatigue in comb fingers
Contamination affecting capacitance measurements
Electrostatic discharge damage

FMEA Triads

Trigger: Humidity or contamination between comb fingers
Failure: Stiction - fingers adhere permanently
Mitigation: Apply hydrophobic coatings, maintain cleanroom assembly, implement anti-stiction bumps

Trigger: Thermal expansion mismatch
Failure: Capacitance drift and sensitivity variation
Mitigation: Use temperature compensation algorithms, select materials with matched CTE, implement thermal isolation structures

Industrial Ecosystem

Compatible With

Typical Suppliers & Equivalents

Compliance & Inspection

Tolerance

±0.5 μm finger width/gap, ±1° finger alignment

Test Method

Laser Doppler vibrometry for displacement measurement, capacitance-voltage (C-V) characterization, angular rate testing on rate tables

Procurement Evaluation Criteria

A practical evidence checklist for RFQ preparation and supplier evaluation.

Technical documentation

Request current drawings, revision history, and a signed specification sheet.

Manufacturing capability

Verify equipment lists, process limits, capacity, and representative production evidence.

Inspection readiness

Confirm test methods, calibrated equipment, sampling plans, and traceable reports.

Supplier transparency

Check the legal entity, factory address, ownership, certifications, and direct contacts.

CNFX does not score or rank suppliers. Buyers must verify all claims and documents with the legal manufacturer before ordering.

Manufacturers of Sense Electrodes/Combs

Manufacturer profiles associated with Sense Electrodes/Combs.

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Compiled and source-reviewed by the CNFX editorial team. Each manufacturer above links to the page on that company's own website where the product is listed, with the date we checked it. How we source and review

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Frequently Asked Questions

What is the difference between sense electrodes and drive electrodes in MEMS gyroscopes?

Drive electrodes create controlled oscillation of the proof mass, while sense electrodes detect Coriolis-induced displacement. Both use comb structures but serve different functions in the gyroscope operation.

Why are sense electrodes typically made of silicon?

Silicon provides excellent mechanical properties (high Young's modulus, low internal friction), compatibility with IC fabrication processes, and good electrical conductivity when doped, making it ideal for MEMS structures.

Data Basis

Editorial classification, named public sources where available, and source-reviewed manufacturer records. See the editorial policy.

Preliminary Technical Classification

This page supports structured research, RFQ preparation, and supplier evaluation. It does not replace buyer-led supplier qualification, standards review, or technical approval.

Sense Electrodes/Combs