Drive electrodes are precision components in MEMS gyroscopes that generate controlled electrostatic forces to induce and sustain mechanical oscillation of the proof mass.
| Parameter | Typical range | Notes & selection driver |
|---|---|---|
| Gap Spacing | 1-3 μm | |
| Drive Voltage | 5-15 V AC (peak-to-peak) | |
| Temperature Range | -40°C to +85°C | |
| Quality Factor (Q) | >10,000 in vacuum | |
| Resonant Frequency | 10-30 kHz typical | |
| Finger Length/Width | 50-200 μm / 2-5 μm | |
| Capacitance (per Electrode Pair) | 10-100 fF |
Ranges are indicative industry figures for RFQ preparation, not a supplier commitment. Confirm every value and standard with the legal manufacturer before ordering.
This component is used in the following industrial products
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This gyroscopic sensor is a component used in computer, electronic, and optical product manufacturing.
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Drive electrodes initiate and maintain the controlled oscillation of the proof mass, creating the reference vibration needed to detect rotation via the Coriolis effect.
They are typically manufactured using MEMS microfabrication processes like deep reactive ion etching (DRIE) on silicon wafers, forming precise comb or plate structures with sub-micron gaps.
Failure can cause loss of oscillation, reduced amplitude, or frequency drift, leading to gyroscope output errors, bias instability, or complete sensor failure.
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