MEMS Microphone Elements: Package Size 3.0 x 2.5 x 0.9 mm

Component Specifications

Definition

MEMS (Micro-Electro-Mechanical Systems) microphone elements are microscopic acoustic transducers fabricated using semiconductor manufacturing processes. These components consist of a flexible diaphragm and fixed backplate that form a variable capacitor, enabling precise sound wave detection. In ANC (Active Noise Cancellation) microphone arrays, multiple MEMS elements work collectively to capture ambient noise for real-time cancellation processing.

Working Principle

Sound pressure waves cause deflection of a silicon diaphragm, changing capacitance between diaphragm and backplate. This capacitance variation is converted to voltage signals through integrated CMOS circuitry, producing electrical output proportional to acoustic input.

Materials

Silicon diaphragm (1-10 μm thickness), silicon backplate, silicon substrate, aluminum/copper electrodes, silicon nitride/polyimide insulation layers, protective polymer membrane.

Technical Parameters

Parameter	Typical range	Notes & selection driver
Sensitivity	-38 dBV/Pa ±1 dB
Package Size	3.0 x 2.5 x 0.9 mm
Power Supply	1.5-3.6 V DC
Frequency Response	20 Hz - 20 kHz
Current Consumption	150 μA
Operating Temperature	-40°C to +85°C
Signal To Noise Ratio	65 dBA
Acoustic Overload Point	120 dB SPL

Ranges are indicative industry figures for RFQ preparation, not a supplier commitment. Confirm every value and standard with the legal manufacturer before ordering.

Standards

IEC 61094-4, ANSI S1.15, ISO 3744

Parent Products

This component is used in the following industrial products

ANC Microphone Array

A multi-microphone system integrated into headphones that captures ambient sound for active noise cancellation processing.

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Engineering Analysis

Risks & Mitigation

Moisture ingress damaging internal circuitry
Acoustic overload causing diaphragm damage
ESD (Electrostatic Discharge) sensitivity
Thermal stress from soldering processes
Acoustic port clogging reducing sensitivity

FMEA Triads

Trigger: Contamination in acoustic port
Failure: Reduced sensitivity and frequency response distortion
Mitigation: Implement cleanroom assembly, use protective membranes with specified pore sizes

Trigger: ESD during handling
Failure: Permanent damage to integrated CMOS circuitry
Mitigation: ESD-protected workstations, proper grounding procedures, protective packaging

Trigger: Thermal mismatch during soldering
Failure: Package cracking or internal stress affecting performance
Mitigation: Controlled reflow profiles, thermal pad design, pre-baking moisture-sensitive packages

Industrial Ecosystem

Compatible With

Typical Suppliers & Equivalents

Compliance & Inspection

Tolerance

±1 dB sensitivity variation across production batch, ±3° phase matching in array configurations

Test Method

Acoustic testing in anechoic chambers using reference sound sources, electrical testing with audio analyzers, environmental testing per IEC 60068 standards

Procurement Evaluation Criteria

A practical evidence checklist for RFQ preparation and supplier evaluation.

Technical documentation

Request current drawings, revision history, and a signed specification sheet.

Manufacturing capability

Verify equipment lists, process limits, capacity, and representative production evidence.

Inspection readiness

Confirm test methods, calibrated equipment, sampling plans, and traceable reports.

Supplier transparency

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Manufacturers of MEMS Microphone Elements

Manufacturer profiles associated with MEMS Microphone Elements.

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Frequently Asked Questions

What is the difference between MEMS and electret condenser microphones?

MEMS microphones use silicon-based fabrication with integrated circuitry, offering better temperature stability, smaller size, and surface-mount compatibility. Electret microphones use charged polymer diaphragms and require external JFET amplifiers.

How many MEMS elements are typically used in ANC arrays?

ANC systems typically use 2-8 MEMS elements arranged in specific geometric patterns to capture spatial noise information for effective cancellation algorithms.

What is the typical lifespan of MEMS microphone elements?

MEMS microphones typically exceed 100,000 hours of operation due to solid-state construction without moving mechanical parts, though environmental protection affects longevity.

Data Basis

Editorial classification, named public sources where available, and source-reviewed manufacturer records. See the editorial policy.

Preliminary Technical Classification

This page supports structured research, RFQ preparation, and supplier evaluation. It does not replace buyer-led supplier qualification, standards review, or technical approval.

MEMS Microphone Elements