Vacuum Channels

Vacuum channels are precisely engineered micro-passages integrated into wafer chucks that create localized vacuum zones to securely hold semiconductor wafers in place during manufacturing processes such as lithography, etching, and inspection. These channels maintain uniform vacuum distribution across the chuck surface to prevent wafer movement, vibration, or deformation while ensuring thermal stability and process repeatability.

Vacuum channels operate by connecting to a vacuum pump system that evacuates air through strategically placed micro-openings on the chuck surface. When activated, atmospheric pressure differential creates suction forces that hold wafers securely against the chuck. The channel geometry, depth, and distribution are optimized to maintain consistent vacuum levels across the entire wafer area while minimizing particulate generation and thermal gradients.