Wafer Fabrication System
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This page explains how Load Port is classified within Computer, Electronic and Optical Product Manufacturing. Technical values and manufacturer relationships are research references; confirm the current specification and supplier evidence for each order.
Interface component in wafer fabrication systems for automated wafer cassette loading and unloading.
Technical details and manufacturing context for Load Port
| Parameter | Typical range | Notes & selection driver |
|---|---|---|
| Wafer Size | 300 mm | Standard for 300 mm wafer fabsSEMI M1 |
| Cassette Slot Pitch | 10 mm | For 25-slot FOUPSEMI E47.1 |
| Cassette Capacity | 25 wafers | Standard FOUP capacitySEMI E47.1 |
| Door Open Time | ≤3 s | Affects throughputSEMI E84 |
| Positioning Repeatability | ±0.05 mm | For kinematic couplingSEMI E57 |
| Leak Rate | ≤1.0e-6 Pa·m³/s | For cleanroom integritySEMI E54 |
| Operating Pressure | 0.1–0.6 MPa | For purge gas supplySEMI E54 |
| Operating Temperature | 15–35 °C | Cleanroom ambientSEMI E54 |
| Humidity Range | 30–70 %RH | Non-condensing |
| Supply Voltage | 24 ±10% V DC | For sensors and actuators |
| Power Consumption | ≤100 W | Peak during door actuation |
| Material | Aluminum 6061 | Anodized for particle controlASTM B221 |
| Weight | 25–40 kg | Depends on options |
| Footprint | 600×600 mm | Width × depth |
Ranges are indicative industry figures for RFQ preparation, not a supplier commitment. Confirm every value and standard with the legal manufacturer before ordering.
Commonly used trade names and technical identifiers for Load Port.
This component is essential for the following industrial systems and equipment:
| pressure: | Atmospheric to 0.5 psi positive pressure |
| flow rate: | N/A (mechanical interface) |
| temperature: | 15-30°C (operating), 5-40°C (storage) |
Indicative industry ranges for design and RFQ preparation. Confirm the exact figures and applicable standard with the manufacturer before specifying.
Quoted from the published standard.
Manufacturer profiles associated with Load Port.
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A practical evidence checklist for RFQ preparation and supplier evaluation.
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A load port is an interface component that enables automated loading and unloading of wafer cassettes (FOUPs or SMIF pods) into and out of semiconductor processing equipment. It maintains the clean environment and ensures proper alignment and sealing.
Relevant standards include SEMI M1 (wafer size), SEMI E47.1 (cassette slot pitch and capacity), SEMI E84 (door open time), SEMI E57 (positioning repeatability), and SEMI E54 (leak rate, operating pressure, temperature). These are reference standards; verify compliance with the manufacturer.
It uses a docking mechanism that seals the cassette to the port, a door opener that interfaces with the cassette's environmental seal, and sensors to verify positioning. It may also provide nitrogen purge or vacuum conditions to prevent contamination.
Verify model-specific parameters such as wafer size, cassette capacity, door open time, positioning repeatability, leak rate, operating pressure, temperature range, and physical dimensions. Confirm these values with the legal manufacturer or supplier.
Editorial classification, named public sources where available, and source-reviewed manufacturer records.
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