Editorial Technical Reference

Vacuum Chamber Body

This page explains how Vacuum Chamber Body is classified within Computer, Electronic and Optical Product Manufacturing. Technical values and manufacturer relationships are research references; confirm the current specification and supplier evidence for each order.

Technical Definition & Core Assembly

The main structural enclosure of a vacuum chamber designed to maintain a controlled low-pressure environment.

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Product Specifications

Technical details and manufacturing context for Vacuum Chamber Body

Definition
The Vacuum Chamber Body is the primary structural component of the Precision Optical Lens Coating Chamber. It serves as the sealed enclosure that houses the coating process, maintaining the necessary high-vacuum environment to prevent contamination and ensure uniform thin-film deposition on optical lenses. Its integrity is critical for achieving the precise optical properties required in high-performance lens systems. The body is typically fabricated from stainless steel grades such as 304 or 316L, with 316L offering enhanced corrosion resistance. Key dimensional parameters include an internal diameter ranging from 300 to 1200 mm, an internal height from 300 to 1500 mm, and a wall thickness from 8 to 30 mm. The ultimate pressure capability is between 1e-3 and 1e-5 Pa, with a leak rate of 1e-9 to 1e-10 Pa·m³/s, ensuring a reliable vacuum seal. Surface roughness is specified as Ra 0.4–0.8 μm to minimize outgassing and particle contamination. The operating temperature range is -20 to 150 °C, and the design pressure for external vacuum service is 0.1–0.5 MPa, referencing GB 150. The weight of the body varies from 50 to 500 kg, affecting handling and installation. These values are directory reference ranges and must be confirmed for the specific model and application with the legal manufacturer or supplier. The body's design and material selection are critical for maintaining vacuum integrity and achieving the required coating quality.
Working Principle
The Vacuum Chamber Body provides a gastight seal to isolate the internal volume from the external atmosphere. It is connected to vacuum pumps that evacuate air and other gases, creating a low-pressure environment. This allows processes like physical vapor deposition (PVD) or chemical vapor deposition (CVD) to coat optical lenses without interference from atmospheric particles or reactive gases. The body's structural integrity and surface finish are essential to achieve and maintain the required vacuum level, preventing leaks and outgassing that could compromise the coating process.
Common Materials
Stainless Steel (e.g., 304, 316L)
Technical Parameters
ParameterTypical rangeNotes & selection driver
Internal Diameter300–1200 mmDetermines the maximum workpiece size.
Internal Height300–1500 mmDetermines the maximum workpiece height.
Wall Thickness8–30 mmAffects structural strength and weight.
Ultimate Pressure1e-3–1e-5 PaLower pressure requires better seals and surface finish.
Leak Rate1e-9–1e-10 Pa·m³/sCritical for maintaining vacuum integrity.
Material Grade304/316L316L offers better corrosion resistance.ASTM A240
Surface RoughnessRa 0.4–0.8 μmSmoother surfaces reduce outgassing and particle contamination.
Operating Temperature-20–150 °CExceeding limits may degrade seals and material properties.
Design Pressure0.1–0.5 MPaExternal pressure rating for vacuum service.GB 150
Weight50–500 kgAffects handling and installation requirements.

Ranges are indicative industry figures for RFQ preparation, not a supplier commitment. Confirm every value and standard with the legal manufacturer before ordering.

Components / BOM
  • Main Shell Part
    Forms the primary cylindrical or rectangular pressure vessel.
    Material: Stainless Steel
  • Flanges Part
    Provide mounting surfaces for sealing with doors, viewports, and port assemblies.
    Material: Stainless Steel
  • Support Structure/Feet Part
    Provides stable mounting and leveling for the chamber on a frame or floor.
    Material: Stainless Steel

Industrial Ecosystem & Supply Chain Structure

Complementary Systems
Downstream Applications
Specialized Tooling

Application Fit & Sizing Matrix

Operational Limits
pressure: Atmospheric to 10^-9 Torr (ultra-high vacuum capable)
other spec: Leak rate < 1x10^-9 mbar·L/s, surface roughness < 0.8 μm Ra for sealing
temperature: -40°C to 200°C (typical for stainless steel, varies with material)
Media Compatibility
✓ High-purity gases (argon, nitrogen) ✓ Plasma processes (etching, deposition) ✓ Semiconductor process chemicals (within material limits)
Unsuitable: Hydrofluoric acid (HF) or other highly corrosive halogens without specialized lining
Sizing Data Required
  • Required internal volume (L or m³)
  • Maximum operating pressure differential (atm or Pa)
  • Port/connection requirements (quantity, size, flange type)

Reliability & Engineering Risk Analysis

Failure Mode & Root Cause
Vacuum Leak
Cause: Fatigue cracking at weld joints or flange seals due to thermal cycling and pressure differentials, often exacerbated by improper gasket installation or material degradation.
Corrosion/Pitting
Cause: Chemical attack from process residues or moisture ingress, particularly in stainless steel chambers, leading to wall thinning and potential breach under vacuum stress.
Maintenance Indicators
  • Audible hissing or whistling during pump-down indicating air ingress
  • Visible condensation or frost spots on chamber exterior suggesting thermal leaks or poor insulation
Engineering Tips
  • Implement regular helium leak testing with mass spectrometry to detect micro-leaks before they escalate
  • Apply passivation treatments to interior surfaces and maintain strict moisture control in the vacuum system to prevent corrosive buildup

Indicative industry ranges for design and RFQ preparation. Confirm the exact figures and applicable standard with the manufacturer before specifying.

Compliance & Manufacturing Standards

Applicable Standards
ISO 21358:2020 Vacuum technology - Vacuum gauges - Calibration of diaphragm vacuum gauges ANSI/ASTM E595-15 Standard Test Method for Total Mass Loss and Collected Volatile Condensable Materials from Outgassing in a Vacuum Environment DIN 28400-1:2016 Vacuum technology - Terms and definitions - Part 1: General terms

Quoted from the published standard.

Manufacturing Precision
  • Leak rate: <1×10⁻⁹ mbar·L/s
  • Surface roughness: Ra ≤ 0.8 μm
Quality Inspection
  • Helium leak test
  • Residual gas analysis (RGA)

Manufacturers of Vacuum Chamber Body

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Frequently Asked Questions

What materials are used for the Vacuum Chamber Body?

The Vacuum Chamber Body is typically made from stainless steel grades 304 or 316L, as listed in the directory. 316L offers better corrosion resistance. The material grade should be confirmed with the manufacturer for the specific application.

What is the ultimate pressure that the chamber body can achieve?

The ultimate pressure range is 1e-3 to 1e-5 Pa, depending on the design and sealing. This is a reference range; the actual achievable pressure must be verified with the manufacturer for the specific model.

How does the chamber body maintain a vacuum?

The body provides a gastight enclosure connected to vacuum pumps. The pumps evacuate air and gases, creating a low-pressure environment. The body's integrity, including seals and surface finish, is critical to prevent leaks and maintain the vacuum.

What are the key parameters to verify before purchasing?

Key parameters include internal diameter, internal height, wall thickness, ultimate pressure, leak rate, material grade, surface roughness, operating temperature, design pressure, and weight. Always confirm these values with the legal manufacturer or supplier for your specific application.

Data Basis

Editorial classification, named public sources where available, and source-reviewed manufacturer records.

Preliminary Technical Classification
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