CVD-coated graphite, silicon and technical-ceramic components for semiconductor equipment. Semicorex's range spans hot-zone susceptors and wafer carriers, gas-distribution parts, precision wafer chucks and selected graphite and ceramic wear components.
What the published manufacturing scope means for a buyer.
Semicorex Advanced Material Technology Co., Ltd. publishes a Ningbo contact address and describes manufacturing dense beta-SiC films on isostatic graphite by chemical vapor deposition. Its catalogue also includes solid CVD SiC, TaC-coated graphite, silicon parts and sintered ceramic components. The first sourcing decision is therefore the material construction, not simply the words 'SiC component': a coating on graphite, a solid deposited part and a sintered ceramic part have different interfaces, drawings and acceptance requirements. [1] [2]
The coating, CVD SiC and component ranges cover distinct chamber and hot-zone functions. A buyer can frame an enquiry around the actual contact surface, substrate and process environment rather than substituting one material family based only on a shared equipment application. [1]
The Si showerhead page describes machining centers, grinding and dedicated drilling, with dimensional accuracy around ±0.005 mm and hole-wall roughness around 0.5 μm Ra for applicable designs. These are company-published, feature-dependent references that give the buyer concrete drawing and inspection questions. [7]
The lithography-chuck page discusses wafer-contact geometry, vacuum features, mounting interfaces and surface specifications. Its value for an equipment owner is the ability to define a replacement drawing and acceptance plan; a tool-brand reference is not proof that every machine revision uses the same part. [8]
CNFX synthesis of the company’s published information.
Separate coating/substrate combinations from solid ceramic or silicon parts, then define the equipment interface.
The company describes CVD beta-SiC on isostatic graphite for epitaxy and other thermal-process components. Susceptor, carrier and chamber-part enquiries should state graphite grade, coating scope, finished dimensions, exposed or masked areas and process atmosphere. Catalogue-wide temperature statements are not a single service rating for every coated part. [3]
The TaC range includes susceptors, pedestal supports, rings and wafer-chuck configurations. The coating page publishes typical thickness information, including 35 ±10 μm; specify the ordered coating thickness, coverage and dimensional condition on the drawing rather than transferring a typical value to every geometry. [5]
The CVD SiC range lists plasma-facing rings, showerheads and other deposited-material components, while the Si showerhead uses silicon and a specified hole pattern. Identify the material grade, gas passages, hole geometry and cleanliness requirements explicitly: these are separate supply options, not interchangeable names for one part. [4]
The lithography offer describes SiC ceramic chucks with custom mounting and vacuum features, and the component range includes end effectors. For the published chuck flatness reference of approximately 0.3–0.5 μm, agree the part size, functional surface, support condition, measurement method and inspection report before acceptance. [8]
The air-bearing page offers porous graphite and the seal page describes alumina, SiC and zirconia components with custom geometry and finish. An air-bearing enquiry needs permeability, air supply and mating-surface requirements; a seal enquiry needs material pairing, media, pressure, speed and lubrication. These components do not establish supply of complete pumps or motion systems. [9]
Published processes, organized by production stage.
Specify coated graphite, solid CVD SiC, silicon or a named ceramic grade. Identify the equipment revision, part drawing, mounting datums, passages and service environment before selecting a manufacturing route. [6]
The company describes isostatic-graphite substrates for CVD SiC coating. Its silicon showerhead page separately describes machining, grinding and drilling, with hole geometry and sidewall condition tied to the design. [7]
For a coated part, define coating coverage and the dimensions before and after coating. For a chuck, define the functional surface and polishing/flatness requirement. These are different acceptance tasks and should not share a generic material certificate as the sole release record. [5]
The lithography-chuck page describes dimensional/surface inspection and vacuum packing with a protective liner, individual box and outer wooden case. Include the required inspection results, cleanliness condition and packaging arrangement in the order-specific release plan. [8]
Translate published capability references into measurable part acceptance and qualification records.
Hole accuracy, coating condition and chuck flatness are component characteristics. Wafer yield, film uniformity and service life also depend on the installed chamber and process. Use a defined sample or replacement-part qualification plan instead of treating a website performance statement as an equipment result. [7]
The coating and graphite pages contain typical material tables and sample-report references. Request the applicable grade, lot, test method and report for the ordered construction. Material values alone do not prove the dimensions, cleanliness or performance of the finished component. [3]
Semicorex publishes a minerals-sourcing policy with supplier due-diligence and documentation expectations. For an order requiring origin information, identify the relevant material and supporting records. The policy is not a product test report or a quality-system certificate. [12]
These are functions described in the supplier's catalogue, not independently verified customer installations.
Coated susceptors and carriers are offered for hot-zone service; vertical boats are separately described for furnace wafer support. Wafer diameter, support geometry, slot arrangement, thermal cycle and atmosphere belong in the part definition. [11]
Silicon showerheads and CVD SiC chamber components address different material and process requirements. The enquiry should connect the hole or ring geometry to the chamber configuration and the buyer's installation and process-qualification plan. [7]
SiC ceramic chucks are presented for lithography and wafer positioning. Procurement should focus on contact geometry, mounting, vacuum distribution, measured flatness and contamination-protective handling, with machine-level performance verified after integration. [8]
CNFX procurement assessment.
Semicorex is relevant to buyers sourcing drawing-defined chamber, hot-zone and wafer-handling parts who can specify material construction and equipment interfaces. Its coating and precision-component pages provide useful starting points, but the quotation should resolve the actual grade, coating/finish, critical dimensions and release records. Broad product tags or equipment-brand mentions are not a replacement for this part-level definition.
No. Semicorex lists both coating-on-graphite and solid ceramic/deposited-material ranges. Specify the substrate, material route and finished-part requirements explicitly.
It identifies an intended application, not every tool revision. Confirm the drawing, wafer-contact and mounting geometry, vacuum features and qualification requirements for the actual machine.
Website research · 2026-10-01
Prepared from Semicorex’s English website. Capability descriptions and application information are company-published; CNFX’s project-fit assessment is editorial analysis. Company claimed indicates profile management, not quality certification. Source methodology.
Ask about capability, specification boundaries, lead time, or what this manufacturer would need from you to quote.
Explore this manufacturer’s products, applications and project opportunities.
Explore custom SiC wafer vacuum chucks from Semicorex Advanced Material Technology Co.,Ltd. Discuss wafer support, mounting and vacuum-channel needs on CNFX.
Read the guide →Discuss your product requirements, manufacturing scope and project schedule.
Send an Enquiry