Electrical Feedthroughs

Electrical feedthroughs are components used in vacuum processing chambers to transmit electrical power, signals, and data from external sources to internal devices such as heaters, sensors, or electrodes, while maintaining the chamber's vacuum seal. They prevent gas leakage and contamination, ensuring stable vacuum conditions for processes like semiconductor manufacturing, thin-film deposition, and surface analysis. These feedthroughs employ hermetic sealing techniques, typically glass-to-metal or ceramic-to-metal seals, around conductive pins or cables. The seal material is fused to both the conductor and the chamber flange, creating a vacuum-tight barrier. Electrical insulation between conductors and the chamber wall is maintained via dielectric materials, while mechanical strength withstands pressure differentials. Common materials include stainless steel for flanges, copper or alloy conductors, glass or ceramic insulation, and Kovar or nickel-iron alloys for matched thermal expansion. The primary specification is the flange diameter or standard size, expressed in millimeters (e.g., CF or ISO-K). For any application, verify model-specific dimensions, electrical ratings, and compatibility with the intended vacuum environment with the legal manufacturer or supplier. This directory entry is for reference only and does not imply certification or compliance.

Electrical feedthroughs use hermetic sealing techniques, such as glass-to-metal or ceramic-to-metal seals, around conductive pins or cables. The seal material is fused to both the conductor and the chamber flange, creating a vacuum-tight barrier. Electrical insulation between conductors and the chamber wall is maintained via dielectric materials, while mechanical strength withstands pressure differentials.