Vacuum Processing Chamber for Medical Imaging Production

Product Specifications

Technical details and manufacturing context for Vacuum Processing Chamber

Definition

The Vacuum Processing Chamber is a critical component of the Integrated Medical Imaging System Production Line. It provides a controlled, low-pressure environment essential for manufacturing processes such as thin-film deposition, degassing, or component assembly. The chamber ensures contamination-free conditions required for producing high-precision medical imaging components like detector arrays, sensor modules, or optical elements. Constructed from stainless steel 316L, high-vacuum compatible ceramics, and borosilicate glass viewports, the chamber is designed for cleanroom use. Its volume ranges from 50 to 200 liters, determining batch size for processing components. The ultimate pressure achievable is between 1e-3 and 1e-2 Pa, with a leak rate not exceeding 1e-9 Pa·m³/s as per ISO 21360, ensuring vacuum integrity. Operating temperature is maintained between 15 and 40 °C, with a heating rate of 5–10 °C/min and temperature uniformity of ±5 °C. The chamber requires a three-phase electrical supply of 380–480 V AC (IEC 60038) and consumes 5–15 kW. It has an ingress protection rating of IP54–IP65 (IEC 60529) and weighs 500–1500 kg, with a footprint of 1.5–3.0 m². These specifications are reference ranges; actual values must be confirmed with the legal manufacturer for the specific model and application. The chamber operates by evacuating air and contaminants using vacuum pumps, then precisely regulating temperature, pressure, and gas composition to enable specific manufacturing processes. It is essential to verify model-specific parameters and standards with the supplier before procurement or integration.

Working Principle

The chamber is evacuated using vacuum pumps to remove air and contaminants, creating a controlled low-pressure environment. During operation, it maintains specified vacuum levels while allowing controlled introduction of process gases or materials. Temperature, pressure, and gas composition are precisely regulated to enable specific manufacturing processes. The chamber's design ensures minimal leakage and thermal uniformity, critical for consistent processing of sensitive components.

Common Materials

Stainless steel 316L, High-vacuum compatible ceramics, Borosilicate glass viewports

Technical Parameters

Parameter	Typical range	Notes & selection driver
Chamber Volume	50–200 L	Determines batch size for processing components.
Ultimate Pressure	1e-3–1e-2 Pa	Lower pressure enables cleaner vacuum environment.
Leak Rate	≤1e-9 Pa·m³/s	Critical for maintaining vacuum integrity.ISO 21360
Operating Temperature	15–40 °C	Affects material stability and process consistency.
Heating Rate	5–10 °C/min	Controls thermal uniformity during processing.
Temperature Uniformity	±5 °C	Ensures consistent processing across chamber.
Electrical Supply	380–480 V AC	Three-phase power for heaters and pumps.IEC 60038
Power Consumption	5–15 kW	Affects operating cost and facility capacity.
Ingress Protection	IP54–IP65	Protects against dust and water ingress.IEC 60529
Chamber Material	316L	Corrosion-resistant stainless steel for cleanroom use.ASTM A240
Weight	500–1500 kg	Consider floor loading and handling requirements.
Footprint	1.5–3.0 m²	Space needed for installation and maintenance.

Ranges are indicative industry figures for RFQ preparation, not a supplier commitment. Confirm every value and standard with the legal manufacturer before ordering.

Components / BOM

Chamber Body Part
Main vacuum-tight enclosure providing the processing volume

Material: Stainless steel 316L
Vacuum Ports Part
Connections for vacuum pumps, gauges, and gas inlets

Material: Stainless steel 316L
Viewport Assembly
Optical access windows for process monitoring

Material: Borosilicate glass with vacuum seals
Electrical Feedthroughs
Vacuum-sealed connections for power and signals to internal components

Material: Ceramic-metal composites
Temperature Control
Holds chamber temperature and thermal uniformity while the process runs.

Manufacturers of Vacuum Processing Chamber

Manufacturer profiles associated with Vacuum Processing Chamber.

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Frequently Asked Questions

What is the purpose of the vacuum processing chamber?

It provides a controlled low-pressure environment for processes like thin-film deposition, degassing, or assembly of medical imaging components, ensuring contamination-free conditions.

What are the key specifications to verify?

Chamber volume (50-200 L), ultimate pressure (1e-3 to 1e-2 Pa), leak rate (≤1e-9 Pa·m³/s per ISO 21360), operating temperature (15-40 °C), and electrical supply (380-480 V AC). Always confirm with the manufacturer.

How is vacuum integrity maintained?

Through use of stainless steel 316L, high-vacuum compatible ceramics, and borosilicate glass viewports, plus a low leak rate as per ISO 21360. Regular leak testing is recommended.

What are the installation requirements?

The chamber weighs 500-1500 kg and has a footprint of 1.5-3.0 m². It requires a three-phase power supply and adequate floor loading capacity. Verify with the supplier.

Data Basis

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Preliminary Technical Classification

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pressure:	10^-6 Torr to 760 Torr (vacuum to atmospheric pressure)
flow rate:	0-100 sccm (standard cubic centimeters per minute) for process gas introduction
temperature:	+15°C to +40°C
slurry concentration:	Not applicable - dry processing environment required

Vacuum Processing Chamber

Product Specifications

Industrial Ecosystem & Supply Chain Structure

Application Fit & Sizing Matrix

Reliability & Engineering Risk Analysis

Compliance & Manufacturing Standards