High-Precision Positioning Stage | Micro Positioning Specs

Product Specifications

Technical details and manufacturing context for Precision Positioning Stage

Definition

The Precision Positioning Stage is a critical component of an Optical Surface Analyzer, responsible for accurately positioning optical elements (such as lenses, mirrors, or the sample under test) with sub-micron or nanometer precision. It enables the analyzer to perform precise scans, measurements, and alignments required for surface topography analysis, ensuring repeatability and accuracy in data acquisition. The stage is typically constructed with an aluminum alloy body, stainless steel guide rails and screws, and ceramic bearing elements. It offers a standard XY travel range of 100–200 mm, with custom ranges available. Positioning accuracy is ±0.1 µm unidirectional, and bidirectional repeatability is ±0.05 µm. Closed-loop control with a linear encoder provides a resolution of 0.01 µm. The stage supports a maximum load of 10–20 kg in horizontal orientation, with a maximum speed of 50–100 mm/s at full load. Over full travel, straightness and flatness are each ±0.5 µm, and pitch, roll, and yaw are each ±2 arcsec. Operating temperature ranges from 10–40 °C (non-condensing), and relative humidity from 20–80% RH (non-condensing). The stage has an ingress protection rating of IP54 per IEC 60529, indicating dust and splash resistance. Depending on configuration, the weight is 15–25 kg. This component is essential for applications requiring high precision and stability, such as semiconductor inspection, metrology, and research. When selecting a stage, verify model-specific values and standards with the legal manufacturer or supplier, as the listed parameters are reference ranges for typical configurations.

Working Principle

The stage uses piezoelectric actuators, linear motors, or precision lead screws driven by servo or stepper motors. A closed-loop control system, often incorporating optical encoders or laser interferometers for position feedback, compares the actual position with the commanded position and adjusts the drive signals to minimize error, achieving precise linear or rotational motion. The control system continuously monitors position and corrects for deviations, ensuring high accuracy and repeatability. The choice of actuator and feedback mechanism depends on the required speed, load, and precision. The stage operates within specified environmental conditions to maintain performance.

Common Materials

Aluminum alloy (for the stage body), Stainless steel (for guide rails and screws), Ceramic (for bearing elements)

Technical Parameters

Parameter	Typical range	Notes & selection driver
Travel Range	100–200 mm	Standard XY travel; custom ranges available
Positioning Accuracy	±0.1 µm	Unidirectional repeatability
Repeatability	±0.05 µm	Bidirectional
Resolution	0.01 µm	Closed-loop with linear encoder
Maximum Load	10–20 kg	Horizontal orientation
Maximum Speed	50–100 mm/s	At full load
Straightness	±0.5 µm	Over full travel
Flatness	±0.5 µm	Over full travel
Pitch and Roll	±2 arcsec	Over full travel
Yaw	±2 arcsec	Over full travel
Operating Temperature	10–40 °C	Non-condensing
Relative Humidity	20–80 % RH	Non-condensing
Ingress Protection	IP54	Dust and splash resistantIEC 60529
Weight	15–25 kg	Depending on configuration

Ranges are indicative industry figures for RFQ preparation, not a supplier commitment. Confirm every value and standard with the legal manufacturer before ordering.

Components / BOM

Stage Platform (Top Plate) Part
The mounting surface for optical components or the sample. Provides a flat, rigid reference plane.

Material: Aluminum alloy or granite
Linear Guide / Bearing System
Provides smooth, low-friction linear motion along one or more axes. Constrains movement to the desired degrees of freedom.

Material: Stainless steel (rails) with ceramic or steel balls/rollers
Drive Mechanism (Actuator)
Generates the force to move the stage. Common types include piezoelectric actuators, linear motors, or precision ball screws driven by rotary motors.

Material: Varies (e.g., piezoelectric ceramic, copper windings, steel screw)
Position Sensor (Encoder/Interferometer)
Measures the actual position of the stage with high resolution and provides feedback to the control system.

Material: Glass scale (for optical encoder) or optical components (for interferometer)
Base / Frame Part
Provides a rigid and stable foundation for the entire stage assembly, isolating it from external vibrations.

Material: Granite, cast iron, or damped aluminum
Motion Controller
Compares commanded position with the encoder reading and trims the drive — the loop behind nanometre accuracy.

Applied To / Applications

This component is essential for the following industrial systems and equipment:

Optical Surface Analyzer

View system integration details

Manufacturers of Precision Positioning Stage

Manufacturer profiles associated with Precision Positioning Stage.

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Compiled and source-reviewed by the CNFX editorial team. Each manufacturer above links to the page on that company's own website where the product is listed, with the date we checked it. How we source and review · Page last updated 6 September 2026

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Frequently Asked Questions

What is the travel range of the Precision Positioning Stage?

The standard XY travel range is 100–200 mm, with custom ranges available. Verify the exact range for your specific model with the manufacturer.

What is the positioning accuracy and repeatability?

Unidirectional positioning accuracy is ±0.1 µm, and bidirectional repeatability is ±0.05 µm. These values are reference ranges; confirm for your configuration.

What feedback system does the stage use?

The stage typically uses a closed-loop control system with optical encoders or laser interferometers for position feedback, achieving a resolution of 0.01 µm.

What is the maximum load capacity?

The maximum load is 10–20 kg in horizontal orientation. Ensure your application load is within this range and verify with the supplier.

Data Basis

Editorial classification, named public sources where available, and source-reviewed manufacturer records.

Preliminary Technical Classification

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pressure:	Atmospheric pressure only (non-pressurized environment)
other spec:	Vibration tolerance: <0.1g RMS, Humidity: 20-80% non-condensing, Cleanliness: Class 1000 or better recommended
temperature:	15°C to 30°C (operating), 0°C to 50°C (storage)

Precision Positioning Stage

Product Specifications

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