Gas mass flow controllers · Thermal, laminar differential-pressure or Coriolis sensing, accuracy as % of setpoint or full scale, turndown, settling time, pressure and warm-up
A mass flow controller (MFC) measures the mass flow of a gas and drives an integral valve to hold it at a setpoint, used to dose process gases in semiconductor, laboratory, fermentation and coating systems. Settle three things before comparing models: the sensing principle for your gases, flow range and conditions, how accuracy and turndown are stated over the range you will use, and the dynamics, pressure rating, materials and interface the system needs.
Thermal, laminar differential-pressure and Coriolis mass flow controllers and meters for gases, with analogue or digital interfaces. Liquid flow controllers, volumetric rotameters, pressure controllers and complete gas panels are outside this page; flow meters have their own page.
01
Alicat explains that thermal bypass meters divert part of the flow through a heated capillary and infer mass flow from the temperature difference between sensors, while thermal MEMS (CMOS) sensors hold a temperature difference and measure the heating current; both depend on gas properties and carry gas tables. Laminar differential-pressure meters measure the pressure drop across a laminar flow element and convert to standardized mass flow using gas-property tables for temperature and pressure. Coriolis meters measure mass flow directly from the twist of a vibrating tube, with no pressure dependence. [3]
The same guide says Coriolis covers the widest range of flows and temperatures, laminar and thermal bypass suit extremely low flows, thermal bypass and Coriolis have the advantage at high pressure, and Coriolis becomes incompatible with low pressure-drop applications. It gives Coriolis response times from 1 to 500 ms depending on size and electronics, and warm-up times from seconds to minutes depending on technology. [3]
Alicat, which makes laminar differential-pressure instruments, says thermal devices may take over 30 minutes to warm up while its own are ready in under 1 second, that thermal instruments need straight, horizontal installation, and that its instruments run from 0.01 to 100% of full scale (10,000:1 turndown). [4] It explains that mass flow is referenced to standard conditions and stated in units such as SLPM and SCCM, so it stays consistent when temperature and pressure change. [5]
Editorial note: the comparisons above come from a laminar-DP maker; check thermal makers' own warm-up, turndown and mounting data, such as the Brooks figures below, before deciding.
Give the supplier the gases and mixtures, full-scale flow and the range you will actually use, inlet and outlet pressure, temperature, required accuracy and repeatability, response or settling time, valve type (normally closed or open, leak-by), wetted materials and seals, surface finish, interface (analogue, RS-485, EtherCAT, EtherNet/IP), power supply and quantity.
02
Brooks lists its SLA5800 thermal mass flow controller for 0.003–2,500 slpm with accuracy up to ±0.6% of setpoint from 20–100% of full scale and ±0.12% of full scale below 20%, turndown of 100:1 from 1–50 slpm and 50:1 from 50–2,500 slpm, repeatability of 0.20% of setpoint, maximum pressure of 1,500 psi and operating temperature of −14 to 65 °C. [1]
Its GF100 EtherCAT series covers 3 sccm to 55 slpm (high-flow versions to 300 slpm) with ±1% of setpoint above 20% of full scale and ±0.2% of full scale from 2–20%, repeatability of ±0.15% of setpoint from 5–100%, settling times of 300 ms to under 1 second, 500 psi maximum pressure, 10–50 °C operating temperature and an all-metal-seal flow path with Hastelloy sensor. [2]
Editorial calculation: on a 100 slpm SLA5800, ±0.12% of full scale is ±0.12 slpm. At a 10 slpm setpoint that is ±1.2% of reading, ten times worse in relative terms than the ±0.12% of full scale suggests; at 50 slpm, ±0.6% of setpoint is ±0.3 slpm. Choose the full-scale range so normal setpoints sit in the %-of-setpoint band. [1]
Linked suppliers list thermal and micro digital gas mass flow controllers, digital MFCs and Coriolis mass flow controllers. [6] [7]
03
The listings reviewed cover thermal and micro thermal MFCs for gases, digital MFCs and Coriolis mass flow controllers; ask each for the accuracy statement (% of setpoint or % of full scale) over your range, turndown, settling time, pressure rating and calibration gas.
04
The sensing principle decides whether gas tables are needed at all: thermal and laminar-DP sensors rely on them, Coriolis measures mass directly. [3]
| Part | Role | Fix in the order |
|---|---|---|
| Flow sensor | Thermal, laminar DP or Coriolis. [3] | Principle. |
| Gas tables / calibration | Convert to standard mass flow. [3] [5] | Gases; calibration. |
| Control valve | Holds setpoint; leak-by option. [2] | Type; leak-by. |
| Electronics and loop | Settling and response. [2] [3] | Settling time. |
| Flow path and seals | Wetted materials, finish. [2] | Metal or elastomer seals. |
| Interface | Analogue or fieldbus. [2] | Protocol. |
05
Brooks states accuracy one way above 20% of full scale and another way below it, so the accuracy row needs both bands for the range you will run. [1]
| Field | What it means and published values | Ask the supplier for |
|---|---|---|
| Flow Rate Range (slpm / sccm) | Examples 0.003–2,500 slpm; 3 sccm–300 slpm. [1] [2] | Full scale; range used. |
| Accuracy (% SP / % FS) | ±0.6% SP (20–100%) and ±0.12% FS (<20%). [1] | % SP and % FS bands. |
| Repeatability (% SP) | 0.20% SP; ±0.15% SP. [1] [2] | Value. |
| Response Time (s) | Settling 0.3 to <1 s. [2] | Settling time. |
| Operating Temperature (°C) | −14 to 65; 10 to 50. [1] [2] | Range. |
| Supply Voltage (V DC) | Power supply. | Voltage. |
| Power Consumption (W) | Valve and electronics. | Value. |
| Analog Output Signal (V DC) | Flow signal. | Range. |
| Analog Input Signal (V DC) | Setpoint signal. | Range. |
| Leak Rate (Pa·m³/s) | Outboard and valve leak; leak-by option. [2] | Values. |
| Ingress Protection | Housing rating. | Rating. |
| Wetted Materials | All-metal seals, Hastelloy sensor. [2] | Materials; finish. |
| Weight (kg) | Per unit. | Weight. |
06
Paste it into your enquiry below or into an email to a maker, then replace every bracket.
Gases: [species; mixtures] Range: [full scale; normal setpoints] Conditions: [inlet/outlet pressure; temperature] Performance: [accuracy; repeatability; settling] Valve: [normally closed/open; leak-by] Materials: [seals; surface finish] Interface: [analogue; RS-485; EtherCAT] Quantity: [per range]
Shanghai Ziasiot lists micro digital thermal MFCs for gases and air, Dalian Zero a Coriolis mass flow controller, and Silver Automation Instruments digital MFCs alongside Coriolis and thermal meters.
Lists micro digital thermal mass flow controllers for gases and air.
Product scope checked 2026-10-11
Lists a Coriolis mass flow controller and digital mass flow meters.
Product scope checked 2026-10-11
Lists digital mass flow controllers alongside Coriolis and thermal mass flow meters.
Product scope checked 2026-10-11
Explore company information and manufacturing capabilities, then discuss the scope of your project with a relevant supplier.
Brooks states ±0.6% of setpoint from 20–100% of full scale and ±0.12% of full scale below 20% for its SLA5800. [1]
Brooks lists 100:1 for 1–50 slpm on its SLA5800; Alicat cites 10,000:1 for its laminar-DP devices. [1] [4]
Brooks lists 300 ms to under 1 second settling for its GF100 series. [2]
Alicat says thermal and laminar-DP meters use gas tables, while Coriolis measures mass directly. [3]
Sources checked 2026-10-12. Brooks Instrument is a thermal mass flow controller maker publishing specifications; Alicat is a laminar differential-pressure maker publishing technology guides; Ziasiot and Zero are linked suppliers.
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