Carrier Gas Supply System
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This page explains how Mass Flow Controller is classified within Machinery and Equipment Manufacturing. Technical values and manufacturer relationships are research references; confirm the current specification and supplier evidence for each order.
A precision instrument that measures and controls the flow rate of gases in a carrier gas supply system.
Technical details and manufacturing context for Mass Flow Controller
| Parameter | Typical range | Notes & selection driver |
|---|---|---|
| Flow Rate Range | 0–100 SLM | Standard range; other ranges available on request |
| Accuracy | ±1.0 % FS | Full scale accuracy at calibration conditions |
| Repeatability | ±0.2 % FS | Under constant conditions |
| Response Time | 1–2 s | To within 2% of setpoint |
| Operating Temperature | -10–50 °C | For electronics; sensor may have wider range |
| Supply Voltage | 24 ±10% V DC | Reverse polarity protected |
| Power Consumption | ≤4 W | At nominal supply voltage |
| Analog Output Signal | 0–5 V DC | Linear with flow rate |
| Analog Input Signal | 0–5 V DC | Setpoint control signal |
| Leak Rate | ≤1×10⁻⁹ Pa·m³/s | Helium leak test |
| Ingress Protection | IP40 | Indoor use onlyIEC 60529 |
| Wetted Materials | 316L | Stainless steel; optional HastelloyASTM A276 |
| Weight | 1.5–2.0 kg | Depending on fittings |
Ranges are indicative industry figures for RFQ preparation, not a supplier commitment. Confirm every value and standard with the legal manufacturer before ordering.
| accuracy: | ±0.5% to ±1.5% of full scale (typical) |
| pressure: | Up to 100 bar (typical), 150 bar (high-pressure models) |
| flow rate: | 0-10 sccm to 0-500 slm (standard ranges), custom ranges available |
| temperature: | -20°C to 70°C (operating), -40°C to 85°C (storage) |
| repeatability: | ±0.1% to ±0.25% of reading |
Indicative industry ranges for design and RFQ preparation. Confirm the exact figures and applicable standard with the manufacturer before specifying.
Quoted from the published standard.
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It uses the thermal principle: a portion of gas flows through a sensor tube, and the heat transfer is measured to determine mass flow rate. The controller adjusts an internal valve to match the setpoint.
The standard flow rate range is 0–100 SLM, with accuracy of ±1.0% FS and repeatability of ±0.2% FS. These are reference values; confirm for your specific model.
The body and wetted parts are stainless steel (316L), with a silicon sensor chip. Optional Hastelloy is available for wetted parts. Verify material compatibility for your gas and application.
Supply voltage is 24 V DC ±10%, power consumption ≤4 W, and analog signals are 0–5 V DC. Operating temperature is -10 to 50 °C, and ingress protection is IP40. Ensure indoor use only.
This component is essential for the following industrial systems and equipment:
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