Semicorex Advanced Material Technology Co., Ltd. supplies semiconductor process components from Ningbo, Zhejiang. Its published range includes SiC-coated graphite susceptors, CVD SiC wafer carriers, wafer boats, wafer chucks, showerheads and tantalum carbide coated components. The company describes CVD silicon carbide coating on graphite for semiconductor process applications, including epitaxy and wafer handling.
Buyers should identify the process chamber, component drawing and revision, wafer size, substrate and coating requirements, operating conditions and inspection requirements. Dimensions, coating specifications and equipment compatibility should be agreed for the particular component rather than inferred from a general product family.