High-Vacuum Pump

Product Specifications

Technical details and manufacturing context for High-Vacuum Pump

Definition

A high-vacuum pump is a critical component of a vacuum pumping system, responsible for creating and sustaining the high vacuum environment required for various industrial and scientific processes. It operates after a primary (roughing) pump has reduced the pressure to a level where high-vacuum pumping mechanisms become effective, enabling the system to reach its ultimate low-pressure operational range. This product is a component intended for integration into larger systems, not a standalone unit. It is typically used in applications such as semiconductor manufacturing, thin-film coating, electron microscopy, and research laboratories. The pump is designed to work with a variety of system configurations, and its performance is characterized by parameters such as ultimate pressure, pumping speed, motor power, supply voltage, frequency, operating temperature range, ingress protection rating, noise level, weight, dimensions, material of wetted parts, and connection size. These parameters are provided as reference ranges and must be verified for the specific model and application. The pump is constructed from materials such as stainless steel, aluminum alloys, and specialized ceramics, which are selected for their durability and compatibility with vacuum environments. The wetted parts are typically made of stainless steel 304/316L, offering corrosion resistance for aggressive media. The pump operates on principles such as momentum transfer (e.g., turbomolecular pumps) or gas capture (e.g., cryopumps or sputter-ion pumps). It is essential to select the pump based on required pumping speed and operating pressure, and to ensure compatibility with the local electrical grid and environmental conditions. For procurement, it is crucial to verify model-specific values and standards with the legal manufacturer or supplier, as the listed standards (e.g., ISO 21360, IEC 60038, IEC 60529, ISO 3744, ASTM A240, DIN 2501) serve as references for testing and interface, not as proof of certification. The pump's performance and reliability depend on proper installation, operation, and maintenance. Regular checks for noise level, vibration, and temperature can indicate potential issues. Failure to operate within specified ranges may affect performance and seal life. This directory entry provides a neutral overview; always consult the manufacturer for detailed specifications and compliance.

Working Principle

High-vacuum pumps typically operate on principles such as momentum transfer (e.g., turbomolecular pumps, which use high-speed rotating blades to direct gas molecules toward the exhaust) or gas capture (e.g., cryopumps, which condense and trap gas molecules on extremely cold surfaces, or sputter-ion pumps, which use electrical fields to ionize and bury gas atoms in a cathode material). These mechanisms are effective only after a roughing pump has reduced the pressure to a level where they can function. The pump's design and materials are chosen to withstand the demands of high vacuum operation, including low outgassing and resistance to corrosion. The ultimate pressure achievable depends on the pump type and system design. Proper selection and integration are critical for achieving the desired vacuum level.

Common Materials

Stainless steel, Aluminum alloys, Specialized ceramics

Technical Parameters

Parameter	Typical range	Notes & selection driver
Ultimate Pressure	≤ 1×10^-3 mbar	Lower ultimate pressure enables higher vacuum applications.ISO 21360
Supply Voltage	380 V AC ±10% V	Other voltages available on request.IEC 60038
Frequency	50/60 Hz	Ensure compatibility with local grid.IEC 60038
Operating Temperature Range	5–40 °C	Exceeding range may affect performance and seal life.
Ingress Protection Rating	IP54–IP55	Higher rating for dusty or wet environments.IEC 60529
Noise Level	60–75 dB(A)	Lower noise preferred for indoor installations.ISO 3744
Weight	80–350 kg	Affects installation and structural support.
Dimensions (L×W×H)	800×400×500 – 1200×600×800 mm	Check space availability and service access.
Connection Size	DN25–DN100 mm	Match with system piping for proper flow.

Ranges are indicative industry figures for RFQ preparation, not a supplier commitment. Confirm every value and standard with the legal manufacturer before ordering.

Components / BOM

Rotor Part
High-speed rotating component (in turbomolecular pumps) that transfers momentum to gas molecules, directing them toward the exhaust.

Material: Aluminum alloy or titanium
Stator
Stationary component with blades that work in conjunction with the rotor to guide gas flow and enhance pumping efficiency.

Material: Stainless steel or aluminum
Bearing System
Supports the high-speed rotor, typically using magnetic levitation or ceramic ball bearings to minimize friction and contamination.

Material: Ceramics, specialized alloys
Cold Surface Optional
The cryopump version: a very cold panel that condenses and holds gas molecules instead of pushing them out.
Cathode Optional
The ion-pump version: ionised gas atoms are buried in this cathode material.

Applied To / Applications

This component is essential for the following industrial systems and equipment:

Vacuum Pumping System

View system integration details

Manufacturers of High-Vacuum Pump

1 company lists this product among what they make. Company figures are quoted from each company's own website; every card states where the relationship came from.

Ningbo Baosi Energy Equipment Co., Ltd.

Shanghai, CN

Founded 2005

Also makes: Vacuum Pump System, Vacuum Valve, Vacuum Pump

Listed on the company's own website · profile compiled by CNFX from public sources

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Frequently Asked Questions

What is the typical ultimate pressure of this high-vacuum pump?

The ultimate pressure is typically ≤ 1×10^-3 mbar, as per ISO 21360. However, the actual value depends on the specific model and system configuration. Always verify with the manufacturer.

What are the common pumping speeds available?

The pumping speed ranges from 50 to 200 m³/h, as per ISO 21360. The required speed depends on the evacuation time and system volume. Confirm the exact value for your application.

What materials are used for the wetted parts?

The wetted parts are typically made of stainless steel 304/316L, which provides corrosion resistance for aggressive media. Other materials like aluminum alloys and specialized ceramics may be used in non-wetted components.

What standards apply to this pump?

Relevant standards include ISO 21360 for vacuum pump performance, IEC 60038 for voltage and frequency, IEC 60529 for ingress protection, ISO 3744 for noise measurement, ASTM A240 for stainless steel, and DIN 2501 for connection sizes. These are references for verification, not proof of compliance.

Data Basis

Editorial classification, named public sources where available, and source-reviewed manufacturer records.

Preliminary Technical Classification

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pressure:	Ultimate vacuum: <10^-3 mbar, Inlet pressure range: 10^-3 to 1013 mbar
other spec:	Flow rate: 1-1000 m³/h (depending on model), Power consumption: 0.5-15 kW, Maximum particle size: <5 μm, Oil-free operation
temperature:	-20°C to +80°C (operating), -40°C to +100°C (storage)

Product Specifications

Applied To / Applications

Industrial Ecosystem & Supply Chain Structure

Application Fit & Sizing Matrix

Reliability & Engineering Risk Analysis

Compliance & Manufacturing Standards