Editorial Technical Reference

Vacuum Valve

This page explains how Vacuum Valve is classified within Machinery and Equipment Manufacturing. Technical values and manufacturer relationships are research references; confirm the current specification and supplier evidence for each order.

Technical Definition & Core Assembly

A valve designed to control the flow of gases or fluids within a vacuum system, maintaining pressure isolation between different sections.

Representative product image. Confirm appearance and specifications with the manufacturer.

Product Specifications

Technical details and manufacturing context for Vacuum Valve

Definition
A vacuum valve is a critical component within a vacuum system that regulates, isolates, or directs the flow of gases or fluids under low-pressure conditions. It ensures system integrity by sealing vacuum chambers, connecting or isolating different vacuum stages, and allowing controlled introduction or removal of substances without compromising the vacuum environment. This directory entry covers vacuum valves used in machinery and equipment manufacturing, typically constructed with a stainless steel body (grade 316L per ASTM A351) and VITON seals (per ASTM D2000) for vacuum compatibility. The valves are available in nominal diameters from 15 to 300 mm (ISO 6708), with an operating pressure range of 1.0 to 1.6 MPa. The leak rate is specified as ≤1.3e-10 Pa·m³/s (helium leak test per ISO 27895), and the operating temperature range is -40 to 85 °C, limited by seal material. Pneumatic actuation time is 0.5 to 2.0 seconds, with a control voltage of 24 V DC (±10%) and power consumption of 8 to 15 W for the solenoid pilot. The valve weight ranges from 2.5 to 45 kg depending on size, and the ingress protection rating is IP54 to IP65 (IEC 60529). These valves are designed for vacuum service, and the listed parameters are reference ranges that must be confirmed for the specific model and application. Always verify model-specific values and standards with the legal manufacturer or supplier before procurement or installation.
Working Principle
The valve operates by creating a physical barrier (seal) between vacuum and atmospheric pressure or between different vacuum levels. Common mechanisms include gate, butterfly, or bellows-sealed designs that open or close via manual, pneumatic, or electric actuators. When closed, the sealing element presses against the valve seat to prevent gas flow, maintaining pressure isolation. When open, the barrier is lifted or rotated to allow controlled gas flow. The actuator, which can be pneumatic or electric, provides the force to move the sealing element. The valve's design ensures that the sealing surfaces are protected from contamination and wear, and the bellows-sealed type prevents atmospheric leakage into the vacuum system. The operating principle is based on the differential pressure across the valve, and the sealing force must be sufficient to withstand the pressure difference without leaking. The valve's performance is verified through helium leak testing to ensure the specified leak rate is met.
Common Materials
Stainless Steel
Technical Parameters
ParameterTypical rangeNotes & selection driver
Nominal Diameter15–300 mmStandard sizes for vacuum serviceISO 6708
Leak Rate≤1.3e-10 Pa·m³/sHelium leak testISO 27895
Operating Temperature-40–85 °CSeal material limits
Actuation Time0.5–2.0 sPneumatic actuation
Control Voltage24 ±10% V DCSolenoid pilot
Power Consumption8–15 WSolenoid coil
Body Material316L SSCorrosion resistantASTM A351
Seal MaterialVITONVacuum compatibleASTM D2000
Weight2.5–45 kgDepends on size
Ingress ProtectionIP54–IP65Dust and water resistantIEC 60529

Ranges are indicative industry figures for RFQ preparation, not a supplier commitment. Confirm every value and standard with the legal manufacturer before ordering.

Components / BOM
  • Valve Body
    Main structural housing that contains internal mechanisms and provides connection ports to the vacuum system.
    Material: Stainless Steel
  • Seal Part
    Creates an airtight closure between valve components to prevent gas leakage, often made from elastomers or metal.
    Material: Viton or Metal
  • Actuator
    Mechanism (manual handle, pneumatic cylinder, or electric motor) that opens or closes the valve.
    Material: Aluminum or Steel
  • Valve Seat
    The fixed face the sealing element presses against to hold the pressure boundary.
  • Sealing Bellows Optional
    Isolates the stem from the vacuum on bellows-sealed versions, preventing atmospheric leakage along it.

Applied To / Applications

This component is essential for the following industrial systems and equipment:

Industrial Ecosystem & Supply Chain Structure

Complementary Systems
Downstream Applications
Specialized Tooling

Application Fit & Sizing Matrix

Operational Limits
pressure: 10^-6 mbar to 1 bar absolute
flow rate: Up to 1000 sccm (standard cubic centimeters per minute)
temperature: -40°C to +85°C
slurry concentration: Not applicable - designed for clean gas/vapor applications
Media Compatibility
✓ High-purity gases (argon, nitrogen) ✓ Chemical vapor deposition (CVD) process gases ✓ Semiconductor etch byproducts
Unsuitable: Abrasive particulate-laden flows or corrosive liquid slurries
Sizing Data Required
  • Required conductance (C) in L/s
  • System ultimate pressure (P_ult) in mbar
  • Maximum allowable leak rate (Q_leak) in mbar·L/s

Reliability & Engineering Risk Analysis

Failure Mode & Root Cause
Seal Degradation
Cause: Chemical attack from process media, thermal cycling, or improper seal material selection leading to leaks and loss of vacuum integrity.
Actuator Failure
Cause: Mechanical wear, contamination, or electrical/control system faults preventing proper valve opening/closing, often due to inadequate maintenance or harsh operating environments.
Maintenance Indicators
  • Audible hissing or whistling during operation indicating vacuum leaks
  • Visible external corrosion, seal extrusion, or erratic valve movement
Engineering Tips
  • Implement regular seal integrity testing and preventive replacement schedules based on manufacturer specifications and operating history
  • Ensure proper filtration of actuation media (pneumatic/hydraulic) and maintain clean operating environments to prevent contamination-induced failures

Indicative industry ranges for design and RFQ preparation. Confirm the exact figures and applicable standard with the manufacturer before specifying.

Compliance & Manufacturing Standards

Applicable Standards
ISO 21358:2020 Vacuum technology - Vacuum valves - Specifications and testing ANSI/FCI 70-2 Control Valve Seat Leakage DIN 28400 Vacuum technology - Dimensions of vacuum flanges

Quoted from the published standard.

Manufacturing Precision
  • Seat Leakage Rate: ≤1×10⁻⁹ Pa·m³/s
  • Surface Roughness (Ra): ≤0.8 μm
Quality Inspection
  • Helium Leak Detection Test
  • Material Composition Verification via XRF Analysis

Manufacturers of Vacuum Valve

9 companies list this product among what they make. Company figures are quoted from each company's own website; every card states where the relationship came from.

Beijing Super Q Technology Co., LTD.
Beijing, CN
Also makes: Vacuum Chamber, Vacuum Gauge, Vacuum Pump and 1 more
Listed on the company's own website · profile compiled by CNFX from public sources
Ningbo Baosi Energy Equipment Co., Ltd.
Shanghai, CN
Founded 2005
Listed on the company's own website · profile compiled by CNFX from public sources
Souz Vacuum
Taizhou, Zhejiang, CN
CE ISO9001 MINE PRODUCT SAFETY MARK CERTIFICATE
Also makes: Vacuum Pump System, Vacuum System, Vacuum Pump and 3 more
Listed on the company's own website · profile compiled by CNFX from public sources
VALUE Vacuum
Shanghai, CN
CE UL CSA
Also makes: Vacuum Pump
Listed on the company's own website · profile compiled by CNFX from public sources
Chinadrip Irrigation Equipment (Xiamen) Co., Ltd.
Xiamen, Fujian, CN
Listed on the company's own website · profile compiled by CNFX from public sources
EVP Vacuum
Shanghai, CN
Also makes: Vacuum Pump System, Vacuum System, Vacuum Pump and 1 more
Listed on the company's own website · profile compiled by CNFX from public sources
Guangzhou GLX Auto Parts Co., Ltd.
Guangzhou, Guangdong, CN
Listed on the company's own website · profile compiled by CNFX from public sources
JTLD AUTOMOTIVE PARTS CO., LIMITED
Qingdao, Shandong, CN
Listed on the company's own website · profile compiled by CNFX from public sources
Shanghai Metal Corporation
Shanghai, CN
Listed on the company's own website · profile compiled by CNFX from public sources

Manufacturer listings support early research and capability understanding. They are not certification, ranking, or transaction guarantees.

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Frequently Asked Questions

What are the typical applications of a vacuum valve?

Vacuum valves are used in vacuum systems to regulate, isolate, or direct gas flow. They are commonly found in semiconductor manufacturing, vacuum coating, metallurgy, and research equipment where maintaining a specific vacuum level is critical.

What materials are used for the valve body and seals?

The body is typically made of stainless steel 316L (per ASTM A351) for corrosion resistance, and the seals are made of VITON (per ASTM D2000) for vacuum compatibility. These materials are specified in the directory entry.

What is the leak rate specification?

The leak rate is specified as ≤1.3e-10 Pa·m³/s, tested with a helium leak test per ISO 27895. This ensures the valve maintains vacuum integrity.

How is the valve actuated?

The valve can be actuated manually, pneumatically, or electrically. For pneumatic actuation, the actuation time is 0.5 to 2.0 seconds, and the control voltage is 24 V DC (±10%) with a solenoid pilot.

Data Basis

Editorial classification, named public sources where available, and source-reviewed manufacturer records.

Preliminary Technical Classification
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